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BALAZSTM nanoanalysis Air Liquide Electronics U.S. LP 46409 Landing Parkway, Fremont CA 94538 Telephone Fax MR JUERGEN HAHN LEVITRONIX TECHNOLOGIES 20 SPEEN STREET SUITE 102 FRAMINGHAM MA 01701 Work Order: Revision: Report Date: Order Date: P.O.: Release: 21-06104 2 16-Jun-21 26-May-21 21.005 Phone: Fax: TM BALAZS TEST RESULTS If you have any questions regarding the results, please call Quynh Le at The information contained in this electronic or original document is confidential information for the intended recipient. If you are not the intended recipient, or the employee or agent responsible for delivering this document to the intended recipient, you are hereby notified that any disclosure, dissemination, distribution or copying of this communication is strictly prohibited. If you have received this document in error, please immediately notify the sender and destroy this document . This report, including any attachments has been reviewed and approved by Lilibeth Valenzuela Laboratory Supervisor These results were obtained by following standard laboratory procedures and are only representative of the samples as received by the laboratory. The liability of AIR LIQUIDE BALAZS NanoAnalysis ("Balazs") shall not exceed the amount paid for this report. In no event shall Balazs be liable for special or consequential damages. Client agrees not to use Balazs' name in reporting results obtained from tests performed by Balazs without first obtaining Balazs written consent as to such use. Report shall not be reproduced except in full, without the written approval of Balazs. Page 1 of 22 BALAZSTM rlanoanalysis Air Liquide Electronics U.S. LP 46409 Landing Parkway, Fremont CA 94538 Telephone Fax MR JUERGEN HAHN LEVITRONIX TECHNOLOGIES 20 SPEEN STREET SUITE 102 FRAMINGHAM MA 01701 Report Date: Order Date: Work Order: P.O.: 16-Jun-21 26-May-21 21-06104 21.005 Sample: #8-UBQ 021 Site: LPP-600.29 ID: PUMP HEAD Component Units W0174-UPW-N-L-C Leachable Low Level 30 Elements in UPW Aluminum (Al) Antimony (Sb) Arsenic (As) Barium (Ba) Bismuth (Bi) Boron (B) Cadmium (Cd) Calcium (Ca) Chromium (Cr) Cobalt (Co) Copper (Cu) Gallium (Ga) Germanium (Ge) Iron (Fe) Lead (Pb) Lithium (Li) Magnesium (Mg) Manganese (Mn) Mercury (Hg) Molybdenum (Mo) Nickel (Ni) Potassium (K) Silver (Ag) Sodium (Na) Strontium (Sr) Tin (Sn) Titanium (Ti) Tungsten (W) Vanadium (V) Zinc (Zn) pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 W0106-UPW-N-L-C Leachable Total Organic Carbon Total Oxidizable Carbon (TOC) pgim2 TOC detection limit was increased due to inorganic carbon interference. W0129-UPW-N-L-C Leachable Single Element (Neodymium) in UPW by ICP-MS Detection Limit 0.2 0.07 0.7 0.03 0.1 2 0.1 2 0.1 0.07 0.2 0.1 0.2 0.3 0.2 0.1 0.07 0.1 0.2 0.2 0.2 0.3 0.1 0.2 0.03 0.07 0.2 0.07 0.1 0.2 40 Result Value 5 1.0 4.8 240 This report, including any attachments has been reviewed and approved by Lilibeth Valenzuela Laboratory Supervisor These results were obtained by following standard laboratory procedures and are only representative of the samples as received by the laboratory. The liability of AIR LIQUIDE BALAZS NanoAnalysis ("Balazs") shall not exceed the amount paid for this report. In no event shall Balazs be liable for special or consequential damages. Client agrees not to use Balazs' name in reporting results obtained from tests performed by Balazs without first obtaining Balazs written consent as to such use. Report shall not be reproduced except in full, without the written approval of Balazs. Page 13 of 22 BALAZSr" nanoanalysis Air Liquide Electronics U.S. LP 46409 Landing Parkway, Fremont CA 94538 Telephone Fax MR JUERGEN HAHN LEVITRONIX TECHNOLOGIES 20 SPEEN STREET SUITE 102 FRAMINGHAM MA 01701 Report Date: Order Date: Work Order: P.O.: 16-Jun-21 26-May-21 21-06104 21.005 Sample: #8-UBQ 021 Site: LPP-600.29 ID: PUMP HEAD Component Neodymium (Nd) Units pg lm2 Detection Limit 0.07 * = Analysis revealed that the element was not found at or above the detection limit. Result Value This report, including any attachments has been reviewed and approved by Lilibeth Valenzuela Laboratory Supervisor These results were obtained by following standard laboratory procedures and are only representative of the samples as received by the laboratory. The liability of AIR LIQUIDE BALAZS NanoAnalysis ("Balazs") shall not exceed the amount paid for this report. In no event shall Balazs be liable for special or consequential damages. Client agrees not to use Balazs' name in reporting results obtained from tests performed by Balazs without first obtaining Balazs written consent as to such use. Report shall not be reproduced except in full, without the written approval of Balazs. Page 14 of 22 BALAZS" nanoanalysis Air Liquide Electronics U.S. LP 46409 Landing Parkway, Fremont CA 94538 Telephone Fax MR JUERGEN HAHN LEVITRONIX TECHNOLOGIES 20 SPEEN STREET SUITE 102 FRAMINGHAM MA 01701 Report Date: Order Date: Work Order: P.O.: 16-Jun-21 26-May-21 21-06104 21.005 Sample: #9-UAX 021 Site: LPP-600.29 ID: PUMP HEAD Component Units W0174-UPW-N-L-C Leachable Low Level 30 Elements in UPW Aluminum (Al) Antimony (Sb) Arsenic (As) Barium (Ba) Bismuth (Bi) Boron (B) Cadmium (Cd) Calcium (Ca) Chromium (Cr) Cobalt (Co) Copper (Cu) Gallium (Ga) Germanium (Ge) Iron (Fe) Lead (Pb) Lithium (Li) Magnesium (Mg) Manganese (Mn) Mercury (Hg) Molybdenum (Mo) Nickel (Ni) Potassium (K) Silver (Ag) Sodium (Na) Strontium (Sr) Tin (Sn) Titanium (Ti) Tungsten (W) Vanadium (V) Zinc (Zn) pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 W0106-UPW-N-L-C Leachable Total Organic Carbon Total Oxidizable Carbon (TOC) pgim2 TOC detection limit was increased due to inorganic carbon interference. W0129-UPW-N-L-C Leachable Single Element (Neodymium) in UPW by ICP-MS Detection Limit 0.2 0.07 0.7 0.03 0.1 2 0.1 2 0.1 0.07 0.2 0.1 0.2 0.3 0.2 0.1 0.07 0.1 0.2 0.2 0.2 0.3 0.1 0.2 0.03 0.07 0.2 0.07 0.1 0.2 40 Result Value 200 This report, including any attachments has been reviewed and approved by Lilibeth Valenzuela Laboratory Supervisor These results were obtained by following standard laboratory procedures and are only representative of the samples as received by the laboratory. The liability of AIR LIQUIDE BALAZS NanoAnalysis ("Balazs") shall not exceed the amount paid for this report. In no event shall Balazs be liable for special or consequential damages. Client agrees not to use Balazs' name in reporting results obtained from tests performed by Balazs without first obtaining Balazs written consent as to such use. Report shall not be reproduced except in full, without the written approval of Balazs. Page 15 of 22 BALAZS" nanoanalysis Air Liquide Electronics U.S. LP 46409 Landing Parkway, Fremont CA 94538 Telephone Fax MR JUERGEN HAHN LEVITRONIX TECHNOLOGIES 20 SPEEN STREET SUITE 102 FRAMINGHAM MA 01701 Report Date: Order Date: Work Order: P.O.: 16-Jun-21 26-May-21 21-06104 21.005 Sample: #11-PERLAST Site: LOT # 202009110225 ID: O-RING (x4) Component Units W0129-UPW-N-L-C Leachable Single Element (Neodymium) in UPW by ICP-MS Neodymium (Nd) pgi rn2 Detection Limit 0.1 * = Analysis revealed that the element was not found at or above the detection limit. Result Value This report, including any attachments has been reviewed and approved by Lilibeth Valenzuela Laboratory Supervisor These results were obtained by following standard laboratory procedures and are only representative of the samples as received by the laboratory. The liability of AIR LIQUIDE BALAZS NanoAnalysis ("Balazs") shall not exceed the amount paid for this report. In no event shall Balazs be liable for special or consequential damages. Client agrees not to use Balazs' name in reporting results obtained from tests performed by Balazs without first obtaining Balazs written consent as to such use. Report shall not be reproduced except in full, without the written approval of Balazs. Page 20 of 22 BALAZSTM lc nanoanalysis Air Liquide Electronics U.S. LP 46409 Landing Parkway, Fremont CA 94538 Telephone Fax MR JUERGEN HAHN LEVITRONIX TECHNOLOGIES 20 SPEEN STREET SUITE 102 FRAMINGHAM MA 01701 Report Date: Order Date: Work Order: P.O.: 16-Jun-21 26-May-21 21-06104 21.005 Sample: METHOD BLANK Component Units W0174-UPW-N-L-C Leachable Low Level 30 Elements in UPW Aluminum (Al) Antimony (Sb) Arsenic (As) Barium (Ba) Bismuth (Bi) Boron (B) Cadmium (Cd) Calcium (Ca) Chromium (Cr) Cobalt (Co) Copper (Cu) Gallium (Ga) Germanium (Ge) Iron (Fe) Lead (Pb) Lithium (Li) Magnesium (Mg) Manganese (Mn) Mercury (Hg) Molybdenum (Mo) Nickel (Ni) Potassium (K) Silver (Ag) Sodium (Na) Strontium (Sr) Tin (Sn) Titanium (Ti) Tungsten (W) Vanadium (V) Zinc (Zn) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) W0106-UPW-N-L-C Leachable Total Organic Carbon Total Oxidizable Carbon (TOC) ppb (pg/L) TOC detection limit was raised from 5 ppb due to inorganic carbon interference. W0129-UPW-N-L-C Leachable Single Element (Neodymium) in UPW by ICP-MS Detection Limit 0.05 0.02 0.2 0.01 0.04 0.5 0.03 0.5 0.03 0.02 0.05 0.04 0.05 0.1 0.05 0.03 0.02 0.03 0.05 0.05 0.05 0.1 0.03 0.06 0.01 0.02 0.05 0.02 0.03 0.06 10 Result Value This report, including any attachments has been reviewed and approved by Lilibeth Valenzuela Laboratory Supervisor These results were obtained by following standard laboratory procedures and are only representative of the samples as received by the laboratory. The liability of AIR LIQUIDE BALAZS NanoAnalysis ("Balazs") shall not exceed the amount paid for this report. In no event shall Balazs be liable for special or consequential damages. Client agrees not to use Balazs' name in reporting results obtained from tests performed by Balazs without first obtaining Balazs written consent as to such use. Report shall not be reproduced except in full, without the written approval of Balazs. Page 21 of 22 BALAZSnanoanalysis Air Liquide Electronics U.S. LP 46409 Landing Parkway, Fremont CA 94538 Telephone Fax MR JUERGEN HAHN LEVITRONIX TECHNOLOGIES 20 SPEEN STREET SUITE 102 FRAMINGHAM MA 01701 Report Date: Order Date: Work Order: P.O.: 16-Jun-21 26-May-21 21-06104 21.005 Sample: METHOD BLANK Component Neodymium (Nd) Units ppb (pg/L) Detection Limit 0.02 Result Value * = Analysis revealed that the element was not found at or above the detection limit. Report Note: UPW Leach conditions: The samples were prepared and leached in accordance with SEMI F57-0301 and SEMI F40-0699 protocols. Each sample was pre -cleaned with ultrapure water and leached using UPW at 85C for 7 days per SEMI F40. A method blank was prepared and leached under identical conditions. Sample results are blank subtracted and normalized to pg/ m2 . UPW Leach Volume (mL); Leach Surface Area (m2): #1-UBR 025: #2-UBR 019: #3-UBR 019: #4-UBR 005: #6-UBR 005: #7-10J: #8-UBQ 021: #9-UAX 021: #10-KALREZ: #11-PERLAST: 27mL; 0.0139m2 25mL; 0.0139m2 25mL; 0.0139m2 27mL; 0.0139m2 27.5mL; 0.0139m2 29mL; 0.0169m2 152mL; 0.0443m2 152mL; 0.0443m2 25mL; 0.00368m2 25mL; 0.00368m2 This report, including any attachments has been reviewed and approved by Lilibeth Valenzuela Laboratory Supervisor These results were obtained by following standard laboratory procedures and are only representative of the samples as received by the laboratory. The liability of AIR LIQUIDE BALAZS NanoAnalysis ("Balazs") shall not exceed the amount paid for this report. In no event shall Balazs be liable for special or consequential damages. Client agrees not to use Balazs' name in reporting results obtained from tests performed by Balazs without first obtaining Balazs written consent as to such use. Report shall not be reproduced except in full, without the written approval of Balazs. Page 22 of 22