Document oo8NJp9x0yzk4mpL7n9mo78
BALAZSTM nanoanalysis
Air Liquide Electronics U.S. LP
46409 Landing Parkway, Fremont CA 94538
Telephone
Fax
MR JUERGEN HAHN LEVITRONIX TECHNOLOGIES 20 SPEEN STREET SUITE 102 FRAMINGHAM MA 01701
Work Order: Revision:
Report Date: Order Date:
P.O.: Release:
21-06104 2 16-Jun-21 26-May-21 21.005
Phone: Fax:
TM BALAZS TEST RESULTS
If you have any questions regarding the results, please call
Quynh Le at
The information contained in this electronic or original document is confidential information for the intended recipient. If you are not the intended recipient, or the employee or agent responsible for delivering this document to the intended recipient, you are hereby notified that any disclosure, dissemination, distribution or copying of this communication is strictly prohibited. If you have received this document in error, please immediately notify the sender and destroy this document .
This report, including any attachments has been reviewed and approved by
Lilibeth Valenzuela
Laboratory Supervisor
These results were obtained by following standard laboratory procedures and are only representative of the samples as received by the laboratory. The liability of AIR LIQUIDE BALAZS NanoAnalysis ("Balazs") shall not exceed the amount paid for this report. In no event shall Balazs be liable for special or consequential damages. Client agrees not to use Balazs' name in reporting results obtained from tests performed by Balazs without first obtaining Balazs written consent as to such use. Report shall not be reproduced except in full, without the written approval of Balazs.
Page 1 of 22
BALAZSTM rlanoanalysis
Air Liquide Electronics U.S. LP
46409 Landing Parkway, Fremont CA 94538
Telephone
Fax
MR JUERGEN HAHN LEVITRONIX TECHNOLOGIES
20 SPEEN STREET SUITE 102 FRAMINGHAM MA 01701
Report Date: Order Date: Work Order:
P.O.:
16-Jun-21 26-May-21 21-06104 21.005
Sample: #8-UBQ 021
Site: LPP-600.29
ID: PUMP HEAD
Component
Units
W0174-UPW-N-L-C Leachable Low Level 30 Elements in UPW
Aluminum (Al) Antimony (Sb) Arsenic (As) Barium (Ba) Bismuth (Bi) Boron (B) Cadmium (Cd) Calcium (Ca) Chromium (Cr) Cobalt (Co) Copper (Cu) Gallium (Ga) Germanium (Ge) Iron (Fe) Lead (Pb) Lithium (Li) Magnesium (Mg) Manganese (Mn) Mercury (Hg) Molybdenum (Mo) Nickel (Ni) Potassium (K) Silver (Ag) Sodium (Na) Strontium (Sr) Tin (Sn) Titanium (Ti) Tungsten (W) Vanadium (V) Zinc (Zn)
pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2
W0106-UPW-N-L-C Leachable Total Organic Carbon Total Oxidizable Carbon (TOC)
pgim2
TOC detection limit was increased due to inorganic carbon interference.
W0129-UPW-N-L-C Leachable Single Element (Neodymium) in UPW by ICP-MS
Detection Limit
0.2 0.07 0.7 0.03 0.1
2 0.1 2 0.1 0.07 0.2 0.1 0.2 0.3 0.2 0.1 0.07 0.1 0.2 0.2 0.2 0.3 0.1 0.2 0.03 0.07 0.2 0.07 0.1 0.2
40
Result Value 5
1.0 4.8 240
This report, including any attachments has been reviewed and approved by
Lilibeth Valenzuela
Laboratory Supervisor
These results were obtained by following standard laboratory procedures and are only representative of the samples as received by the laboratory. The liability of AIR LIQUIDE BALAZS NanoAnalysis ("Balazs") shall not exceed the amount paid for this report. In no event shall Balazs be liable for special or consequential damages. Client agrees not to use Balazs' name in reporting results obtained from tests performed by Balazs without first obtaining Balazs written consent as to such use. Report shall not be reproduced except in full, without the written approval of Balazs.
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BALAZSr"
nanoanalysis
Air Liquide Electronics U.S. LP
46409 Landing Parkway, Fremont CA 94538
Telephone
Fax
MR JUERGEN HAHN LEVITRONIX TECHNOLOGIES 20 SPEEN STREET SUITE 102 FRAMINGHAM MA 01701
Report Date: Order Date: Work Order: P.O.:
16-Jun-21 26-May-21 21-06104 21.005
Sample: #8-UBQ 021
Site: LPP-600.29
ID: PUMP HEAD
Component Neodymium (Nd)
Units
pg lm2
Detection Limit 0.07
* = Analysis revealed that the element was not found at or above the detection limit.
Result Value
This report, including any attachments has been reviewed and approved by
Lilibeth Valenzuela
Laboratory Supervisor
These results were obtained by following standard laboratory procedures and are only representative of the samples as received by the laboratory. The liability of AIR LIQUIDE BALAZS NanoAnalysis ("Balazs") shall not exceed the amount paid for this report. In no event shall Balazs be liable for special or consequential damages. Client agrees not to use Balazs' name in reporting results obtained from tests performed by Balazs without first obtaining Balazs written consent as to such use. Report shall not be reproduced except in full, without the written approval of Balazs.
Page 14 of 22
BALAZS" nanoanalysis
Air Liquide Electronics U.S. LP
46409 Landing Parkway, Fremont CA 94538
Telephone
Fax
MR JUERGEN HAHN LEVITRONIX TECHNOLOGIES
20 SPEEN STREET SUITE 102 FRAMINGHAM MA 01701
Report Date: Order Date: Work Order:
P.O.:
16-Jun-21 26-May-21 21-06104 21.005
Sample: #9-UAX 021
Site: LPP-600.29
ID: PUMP HEAD
Component
Units
W0174-UPW-N-L-C Leachable Low Level 30 Elements in UPW
Aluminum (Al) Antimony (Sb) Arsenic (As) Barium (Ba) Bismuth (Bi) Boron (B) Cadmium (Cd) Calcium (Ca) Chromium (Cr) Cobalt (Co) Copper (Cu) Gallium (Ga) Germanium (Ge) Iron (Fe) Lead (Pb) Lithium (Li) Magnesium (Mg) Manganese (Mn) Mercury (Hg) Molybdenum (Mo) Nickel (Ni) Potassium (K) Silver (Ag) Sodium (Na) Strontium (Sr) Tin (Sn) Titanium (Ti) Tungsten (W) Vanadium (V) Zinc (Zn)
pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2 pgirn2
W0106-UPW-N-L-C Leachable Total Organic Carbon Total Oxidizable Carbon (TOC)
pgim2
TOC detection limit was increased due to inorganic carbon interference.
W0129-UPW-N-L-C Leachable Single Element (Neodymium) in UPW by ICP-MS
Detection Limit
0.2 0.07 0.7 0.03 0.1
2 0.1 2 0.1 0.07 0.2 0.1 0.2 0.3 0.2 0.1 0.07 0.1 0.2 0.2 0.2 0.3 0.1 0.2 0.03 0.07 0.2 0.07 0.1 0.2
40
Result Value 200
This report, including any attachments has been reviewed and approved by
Lilibeth Valenzuela
Laboratory Supervisor
These results were obtained by following standard laboratory procedures and are only representative of the samples as received by the laboratory. The liability of AIR LIQUIDE BALAZS NanoAnalysis ("Balazs") shall not exceed the amount paid for this report. In no event shall Balazs be liable for special or consequential damages. Client agrees not to use Balazs' name in reporting results obtained from tests performed by Balazs without first obtaining Balazs written consent as to such use. Report shall not be reproduced except in full, without the written approval of Balazs.
Page 15 of 22
BALAZS" nanoanalysis
Air Liquide Electronics U.S. LP
46409 Landing Parkway, Fremont CA 94538
Telephone
Fax
MR JUERGEN HAHN LEVITRONIX TECHNOLOGIES 20 SPEEN STREET SUITE 102 FRAMINGHAM MA 01701
Report Date: Order Date: Work Order: P.O.:
16-Jun-21 26-May-21 21-06104 21.005
Sample: #11-PERLAST
Site: LOT # 202009110225
ID: O-RING (x4)
Component
Units
W0129-UPW-N-L-C Leachable Single Element (Neodymium) in UPW by ICP-MS
Neodymium (Nd)
pgi rn2
Detection Limit
0.1
* = Analysis revealed that the element was not found at or above the detection limit.
Result Value
This report, including any attachments has been reviewed and approved by
Lilibeth Valenzuela
Laboratory Supervisor
These results were obtained by following standard laboratory procedures and are only representative of the samples as received by the laboratory. The liability of AIR LIQUIDE BALAZS NanoAnalysis ("Balazs") shall not exceed the amount paid for this report. In no event shall Balazs be liable for special or consequential damages. Client agrees not to use Balazs' name in reporting results obtained from tests performed by Balazs without first obtaining Balazs written consent as to such use. Report shall not be reproduced except in full, without the written approval of Balazs.
Page 20 of 22
BALAZSTM
lc nanoanalysis
Air Liquide Electronics U.S. LP
46409 Landing Parkway, Fremont CA 94538
Telephone
Fax
MR JUERGEN HAHN LEVITRONIX TECHNOLOGIES
20 SPEEN STREET SUITE 102 FRAMINGHAM MA 01701
Report Date: Order Date: Work Order:
P.O.:
16-Jun-21 26-May-21 21-06104 21.005
Sample: METHOD BLANK
Component
Units
W0174-UPW-N-L-C Leachable Low Level 30 Elements in UPW
Aluminum (Al) Antimony (Sb) Arsenic (As) Barium (Ba) Bismuth (Bi) Boron (B) Cadmium (Cd) Calcium (Ca) Chromium (Cr) Cobalt (Co) Copper (Cu) Gallium (Ga) Germanium (Ge) Iron (Fe) Lead (Pb) Lithium (Li) Magnesium (Mg) Manganese (Mn) Mercury (Hg) Molybdenum (Mo) Nickel (Ni) Potassium (K) Silver (Ag) Sodium (Na) Strontium (Sr) Tin (Sn) Titanium (Ti) Tungsten (W) Vanadium (V) Zinc (Zn)
ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L) ppb (pg/L)
W0106-UPW-N-L-C Leachable Total Organic Carbon Total Oxidizable Carbon (TOC)
ppb (pg/L)
TOC detection limit was raised from 5 ppb due to inorganic carbon interference.
W0129-UPW-N-L-C Leachable Single Element (Neodymium) in UPW by ICP-MS
Detection Limit
0.05 0.02 0.2 0.01 0.04 0.5 0.03 0.5 0.03 0.02 0.05 0.04 0.05 0.1 0.05 0.03 0.02 0.03 0.05 0.05 0.05 0.1 0.03 0.06 0.01 0.02 0.05 0.02 0.03 0.06
10
Result Value
This report, including any attachments has been reviewed and approved by
Lilibeth Valenzuela
Laboratory Supervisor
These results were obtained by following standard laboratory procedures and are only representative of the samples as received by the laboratory. The liability of AIR LIQUIDE BALAZS NanoAnalysis ("Balazs") shall not exceed the amount paid for this report. In no event shall Balazs be liable for special or consequential damages. Client agrees not to use Balazs' name in reporting results obtained from tests performed by Balazs without first obtaining Balazs written consent as to such use. Report shall not be reproduced except in full, without the written approval of Balazs.
Page 21 of 22
BALAZSnanoanalysis
Air Liquide Electronics U.S. LP
46409 Landing Parkway, Fremont CA 94538
Telephone
Fax
MR JUERGEN HAHN LEVITRONIX TECHNOLOGIES
20 SPEEN STREET SUITE 102 FRAMINGHAM MA 01701
Report Date: Order Date: Work Order:
P.O.:
16-Jun-21 26-May-21 21-06104 21.005
Sample: METHOD BLANK
Component Neodymium (Nd)
Units ppb (pg/L)
Detection Limit 0.02
Result Value
* = Analysis revealed that the element was not found at or above the detection limit. Report Note: UPW Leach conditions:
The samples were prepared and leached in accordance with SEMI F57-0301 and SEMI F40-0699 protocols. Each sample was pre -cleaned with ultrapure water and leached using UPW at 85C for 7 days per SEMI F40.
A method blank was prepared and leached under identical conditions. Sample results are blank subtracted and normalized to pg/
m2 .
UPW Leach Volume (mL); Leach Surface Area (m2):
#1-UBR 025: #2-UBR 019: #3-UBR 019: #4-UBR 005: #6-UBR 005: #7-10J: #8-UBQ 021: #9-UAX 021: #10-KALREZ: #11-PERLAST:
27mL; 0.0139m2 25mL; 0.0139m2 25mL; 0.0139m2 27mL; 0.0139m2 27.5mL; 0.0139m2 29mL; 0.0169m2 152mL; 0.0443m2 152mL; 0.0443m2 25mL; 0.00368m2 25mL; 0.00368m2
This report, including any attachments has been reviewed and approved by
Lilibeth Valenzuela
Laboratory Supervisor
These results were obtained by following standard laboratory procedures and are only representative of the samples as received by the laboratory. The liability of AIR LIQUIDE BALAZS NanoAnalysis ("Balazs") shall not exceed the amount paid for this report. In no event shall Balazs be liable for special or consequential damages. Client agrees not to use Balazs' name in reporting results obtained from tests performed by Balazs without first obtaining Balazs written consent as to such use. Report shall not be reproduced except in full, without the written approval of Balazs.
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