Document b50GN7EYGqxzmeka26vQ9dVOO
Fluororesin Products for PFA lined ball valve, Insertion pipe, safety valve, pressure gauze, gasket, and etc. for use of transportation of chemical solution in semiconductor devise and liquid crystal factory.
PFAS used in the products is PTFE and PFA, which are polymer materials, and there is no concern about exposure, leakage, or environmental release of eluates.
Reference: SDS of PFA in Daikin Industries
This product is to be used under the following conditions. Subject to use: PFA lined ball valve, Insertion pipe, safety valve, pressure gauze, gasket, and etc. for use of transportation of chemical solution in semiconductor devise and liquid crystal factory Fluid to be used: Unspecified due to wide variety Usage Environment: RT60 Use Conditions: Not to be affected by fluids in the use environment and no leakage. No elution of metal ions in chemicals
There is no perfect replacement product at the moment since they are required to be chemical-resistance for fluid and not to extract metal ions for chemical solution.
Reference: Plastic Data Handbook, VALQUA Handbook Technical Section, Kogyo Chosakai Publishing Co., Ltd.
As mentioned above, the presence of fluororesin product is essential for transport container of high purity chemical solution for semiconductor.
We propose a regulatory exemption for the above reasons.
Attachment 1: PTFE Safety Date Sheet
r FDA IKt~
Printing date 06.02.2023
Safety data sheet
Version number I
Page 1/6 Revision: 06.02.2023
SECTION1: Identification of the substance/mixture and of the company/undertaking
1.1 Product identifier
Trade name: POLYFLON PTFE M-12, 18, 18F, 391S, 392, 393 Article number: M 1.2 Relevant identified uses of the substance or mixture and uses advised against: No further relevant information available.
1.3 Details of the supplier of the safety data sheet
Manufacturer/Supplier:
DAIKIN INDUSTRIES, LTD. CHEMICALS DIVISION:
OSAKA UMEDA TWIN TOWERS SOUTH 1-13-I Umeda, Kita-ku, Osaka-shi, Osaka, 530-0001, Japan
Phone:
Fax:
Further information obtainable from: http://www.daikin.com/
1.4 Emerrencv telephone number:
Japan:
China:
+86-21-34151689
South Korea:
Americas: CHEMTREC
(Outside US/Canada:
Europe: +49-211-179 225-0
SECTION 2: Hazard identification
2.1 Classification of the substance or mixture Classification according to Regulation (EC) No 1272/2008 The substance is not classified, according to the CLP regulation.
2.2 Label elements Labelling according to Regulation (EC) No 1272/2008: Not applicable Signal word: Not applicable
SECTION 3: Composition/information on ingredients
Information on ingredients:
CAS: 9002-84-0 Polytetrafluoroethylene
SECTION 4: First aid measures
100%
4.1 Description offirst aid measures General information: Seek medical treatment. After inhalation: In case of inhaling decomposed gases: supplyfresh air and consult a doctor in case of complaints. After skin contact: Immediately wash with water and soap and rinse thoroughly. After contact with the molten product, cool rapidly with cold water. Do not pull solidified product off the skin. After eye contact: Rinse opened eyefor several minutes under running water. Consult an ophthalmologist in case of complaints. After swallowing: If symptoms persist consult a doctor. 4.2 Most important symptoms and effects, both acute and chronic: Nofurther relevant information available. 4.3 Indication of any immediate medical attention and special treatment needed: No further relevant information available.
SECTION 5: Firefighting measures
5.1 Extinguishing media Suitable extinguishing agents: Usefire extinguishing methods suitablefor surrounding conditions. For safety reasons unsuitable extinguishing agents: Nofurther information available. 5.2 Special hazards arisingfrom the substance or mixture: Formation of toxic gases is possible during heating or in case office.
Attachment 2: PFA Safty Date Sheet
r DAIKIN
Printing date 06.02.2023
Safety data sheet
Version number 1
Page 1/6 Revision: 06.02.2023
SECTION I: Identification of the substance/mixture and of the company/undertaking
1.1 Product identifier
Trade name: NEOFLON PFA AP-201, 202, 210, 220, 230, 201SH, 211SH, 215SH,221SH, 230SH, 231SH Article number: AP2 STD
1.2 Relevant identified uses of the substance or mixture and uses advised against: No further relevant information available.
1.3 Details of the supplier of the safety data sheet
Manufacturer/Supplier:
DAIKIN INDUSTRIES, LTD. CHEMICALS DIVISION:
OSAKA UMEDA TWIN TOWERS SOUTH 1-13-1 Umeda, Kita-ku, Osaka-shi, Osaka, 530-0001, Japan
Phone:
Fax:
Further information obtainable from: httpillwww.daikin.com/
1.4 EmerRencV telephone number:
Japan:
China:
+86-21-34151689
South Korea:
Americas: CHEMTREC
(Outside US/Canada: +1-703-527-3887)
Europe: +49-211-179 225-0
SECTION 2: Hazard identification
2.1 Classification of the substance or mixture Classification according to Regulation (EC) No 1272/2008 The product is not classified, according to the CLP regulation.
2.2 Label elements Labelling according to Regulation (EC) No 1272/2008: Not applicable Signal word: Not applicable
SECTION 3: Composition/information on ingredients
Information on ingredients:
CAS: 26655-00-5 Pmfluoro(alkoxy alkane) Additional information: For the wording of the listed hazard phrases refer to section 16.
SECTION 4: First aid measures
100%
4.1 Description offirst aid measures General information: Seek medical treatment. After inhalation: In case of inhaling decomposed gases: supplyfresh air and consult a doctor in case of complaints. After skin contact: Immediately wash with water and soap and rinse thoroughly. After contact with the molten product, cool rapidly with cold water. Do not pull solidified product off the skin. Consult a doctor in case of complaints. After eye contact: Rinse opened eyefor several minutes under running water. Consult an ophthalmologist in case of complaints. After swallowing: If symptoms persist consult a doctor. 4.2 Most important symptoms and effects, both acute and chronic: No further relevant information available. 4.3 Indication of any immediate medical attention and special treatment needed: Nofurther relevant information available.
SECTION 5: Firefighting measures
5.1 Extinguishing media Suitable extinguishing agents: Usefire extinguishing methods suitablefor surrounding conditions. For safety reasons unsuitable extinguishing agents: No further information available. 5.2 Special hazards arisingfrom the substance or mixture: Formation of toxic gases is possible during heating or in case offire.
Attachment 3: Chemical resistance of various resins
Attachment 4: Heat resistance of various resins
Attachment 5: Purity of fluororesin VALQUA Handbook Technical Section