Document aDavRZ8moE4VKzBavL94xLNLa

Fluororesin Products for Manufacturing Processes of ultra-pure chemical slutions for semiconductor. Lining tank (PTFE), lining piping (PTFE, PFA), lining valve (PTFE, PFA), insertion tube (PTFE, PFA), gasket (PTFE), bellows (PTFE, PFA) Flexible hose (PTFE, PFA), pliable hose (PTFE, PFA) PFAS used in the products is PTFE and PFA, which are polymer materials, and there is no concern about exposure, leakage, or environmental release of eluates. (Reference: SDS of PTFE in Daikin Industries, SDS of PFA in Daikin Industries, attached 1,2) This product is to be used under the following conditions. Subject to use: Wetted parts of the devices for storage, transportation, supply, dripping, jet and etc. in various ultra-pure chemicals solutions for semiconductor. Fluid to be used: Hydrofluoric acid, Sulfuric acid, Nitric acid, Hydrogen peroxide solution, Hydrochloric acid, Acetic acid, Phosphoric acid, Ammonia+TMAH, Photoresist, etc. Usage Environment: RT150 Use Conditions: Not to be affected by fluids in the use environment and no leakage. No elution of metal ions in chemicals Required to meet the above specification conditions, and no perfect alternative product is considered to be available at this time, (Reference: Plastic Data Handbook Kogyo Chosakai Publishing Co., Ltd. attached 3,4, VALQUA Handbook Technical Section, attached 5) As mentioned above, the presence of fluororesin product is essential for chemicals used in manufacturing processes of ultra-pure chemicals solutions for semiconductor. The most of them are used for the manufacturing process of semiconductor as essential materials. Semiconductor market size reaches 600 billion dollar. If they were prohibited to use, it has a huge impact for the society and economy. We propose a regulatory exemption for the above reasons. Attachment 1: PTFE Safety Date Sheet r FDA IKt~ Printing date 06.02.2023 Safety data sheet Version number I Page 1/6 Revision: 06.02.2023 SECTION1: Identification of the substance/mixture and of the company/undertaking 1.1 Product identifier Trade name: POLYFLON PTFE M-12, 18, 18F, 391S, 392, 393 Article number: M 1.2 Relevant identified uses of the substance or mixture and uses advised against: No further relevant information available. 1.3 Details of the supplier of the safety data sheet Manufacturer/Supplier: DAIKIN INDUSTRIES, LTD. CHEMICALS DIVISION: OSAKA UMEDA TWIN TOWERS SOUTH 1-13-I Umeda, Kita-ku, Osaka-shi, Osaka, 530-0001, Japan Phone: Fax: Further information obtainable from: http://www.daikin.com/ 1.4 Emerrencv telephone number: Japan: China: +86-21-34151689 South Korea: Americas: CHEMTREC (Outside US/Canada: Europe: +49-211-179 225-0 SECTION 2: Hazard identification 2.1 Classification of the substance or mixture Classification according to Regulation (EC) No 1272/2008 The substance is not classified, according to the CLP regulation. 2.2 Label elements Labelling according to Regulation (EC) No 1272/2008: Not applicable Signal word: Not applicable SECTION 3: Composition/information on ingredients Information on ingredients: CAS: 9002-84-0 Polytetrafluoroethylene SECTION 4: First aid measures 100% 4.1 Description offirst aid measures General information: Seek medical treatment. After inhalation: In case of inhaling decomposed gases: supplyfresh air and consult a doctor in case of complaints. After skin contact: Immediately wash with water and soap and rinse thoroughly. After contact with the molten product, cool rapidly with cold water. Do not pull solidified product off the skin. After eye contact: Rinse opened eyefor several minutes under running water. Consult an ophthalmologist in case of complaints. After swallowing: If symptoms persist consult a doctor. 4.2 Most important symptoms and effects, both acute and chronic: Nofurther relevant information available. 4.3 Indication of any immediate medical attention and special treatment needed: No further relevant information available. SECTION 5: Firefighting measures 5.1 Extinguishing media Suitable extinguishing agents: Usefire extinguishing methods suitablefor surrounding conditions. For safety reasons unsuitable extinguishing agents: Nofurther information available. 5.2 Special hazards arisingfrom the substance or mixture: Formation of toxic gases is possible during heating or in case office. Attachment 2: PFA Safty Date Sheet r DAIKIN Printing date 06.02.2023 Safety data sheet Version number 1 Page 1/6 Revision: 06.02.2023 SECTION I: Identification of the substance/mixture and of the company/undertaking 1.1 Product identifier Trade name: NEOFLON PFA AP-201, 202, 210, 220, 230, 201SH, 211SH, 215SH,221SH, 230SH, 231SH Article number: AP2 STD 1.2 Relevant identified uses of the substance or mixture and uses advised against: No further relevant information available. 1.3 Details of the supplier of the safety data sheet Manufacturer/Supplier: DAIKIN INDUSTRIES, LTD. CHEMICALS DIVISION: OSAKA UMEDA TWIN TOWERS SOUTH 1-13-1 Umeda, Kita-ku, Osaka-shi, Osaka, 530-0001, Japan Phone: Fax: Further information obtainable from: httpillwww.daikin.com/ 1.4 EmerRencV telephone number: Japan: China: +86-21-34151689 South Korea: Americas: CHEMTREC (Outside US/Canada: +1-703-527-3887) Europe: +49-211-179 225-0 SECTION 2: Hazard identification 2.1 Classification of the substance or mixture Classification according to Regulation (EC) No 1272/2008 The product is not classified, according to the CLP regulation. 2.2 Label elements Labelling according to Regulation (EC) No 1272/2008: Not applicable Signal word: Not applicable SECTION 3: Composition/information on ingredients Information on ingredients: CAS: 26655-00-5 Pmfluoro(alkoxy alkane) Additional information: For the wording of the listed hazard phrases refer to section 16. SECTION 4: First aid measures 100% 4.1 Description offirst aid measures General information: Seek medical treatment. After inhalation: In case of inhaling decomposed gases: supplyfresh air and consult a doctor in case of complaints. After skin contact: Immediately wash with water and soap and rinse thoroughly. After contact with the molten product, cool rapidly with cold water. Do not pull solidified product off the skin. Consult a doctor in case of complaints. After eye contact: Rinse opened eyefor several minutes under running water. Consult an ophthalmologist in case of complaints. After swallowing: If symptoms persist consult a doctor. 4.2 Most important symptoms and effects, both acute and chronic: No further relevant information available. 4.3 Indication of any immediate medical attention and special treatment needed: Nofurther relevant information available. SECTION 5: Firefighting measures 5.1 Extinguishing media Suitable extinguishing agents: Usefire extinguishing methods suitablefor surrounding conditions. For safety reasons unsuitable extinguishing agents: No further information available. 5.2 Special hazards arisingfrom the substance or mixture: Formation of toxic gases is possible during heating or in case offire. Attachment 3: Chemical resistance of various resins Attachment 4: Heat resistance of various resins Attachment 5: Purity of fluororesin VALQUA Handbook Technical Section