Document Dd4eDEwXnRVLo5wd7qNmjDOx5
ApTU
Analytik fur Technik und Umwelt
Levitronix GmbH Attn. to Mr. Alexander Schmid Technoparkstrasse 1 CH-8005 ZOrich
ATU GmbH - Analytik fiir Technik und Umwelt
P.O. Box 1224 D-71071 Herrenberg
Hertzstrasse 17
n D-71083 Herrenberg 07032/7960-0 A -99 @atu-lab.de
Quality Management We are certified
08/04/2017
Determination of leachable contaminants according to Semi Specification F40/ 57
Sample received: July 27th, 2017 / ATU-Job-ID: # 1707 078 / Analyst: M. Reutz
1. Subject / Sample description For the determination of water-leachable contaminants we received 2 Titan discs, 1 stainless steel disc and 1 PTFE-Carbon-Cap. Specific test methods and required performance specification limits are described in SEMI F40 and SEMI 57 "Provisional specification for polymer components used in ultrapure water and liquid chemical distribution systems".
Tab.1: Sample name and sample parameters
Sample description
Internnuaml Sbaemr ple Surface area [cm2]
Test Method Accord. F40/F57
Titan Disc Grade 5, 19x2 mm
1707 078 -1
6,645
Titan Disc Grade 5 anodized, 19x2 mm
Stainless Steel Disc 1.4435, 30x2 mm
1707 078 - 2 1707 078 - 3
6,645 12,756
Leachable Inorganics Leachable TOC
PTFE-Carbon-Cap
1707 078 - 4
145,6019
ATU GmbH - Analytik fUr Technik und Umwelt, Hertzstrasse 17, D-71083 Herrenberg, Postfach 1224, D-71071 Herrenberg Amtsgericht Stuttgart, HRB 244136, Geschaftsfuhrer: Wolfgang Erlmann, Hans-Dieter Schmidt
ATU-Job ID: 1707 078 page 1 of 4
2. Preparation All sample preparation steps were carried out in a class 1 cleanbench, located in a class 1000 cleanroom, in accordance to SEMI F40/F57. The content of leachable contaminants in the UPW (ultrapure water), which was used as extraction liquid, were below the SEMI F63 Spec. The conductivity of the UPW was 18.2 megohm-cm, the TOC level was approximately 2 ppb. Nitric acid (HNO3) which was used for dilution was of XLSI quality. The samples were put in cleaned PFA-container, filled and drained with UPW 10 times. After each fill, the UPW was left for two minutes before draining. The 11th fill was used for the test. After 7 days at 85C the test-fluid (UPW) was analyzed for leachables.
Tab.2: preparation parameters Test Method Leachable Inorganics Leachable TOC
Soaking solution UPW UPW
Soaking parameters 7 days at 85C 7 days at 85C
3. Analysis
3.1 Leachable Inorganics The analysis was done by inductively coupled plasma-mass spectrometry [ICP-MS Agilent 7500 cs], Quantification was carried out by external calibration, using NIST reference and traceable standards, diluted in UPW.
3.2 Leachable TOC The analysis is done with thin film UV-oxidation, using NIST reference and traceable standards for calibration.
ATU GmbH - Analytik fr Technik und Umwelt, Hertzstrasse 17, D-71083 Herrenberg, Postfach 1224, D-71071 Herrenberg Amtsgericht Stuttgart, HRB 244136, Geschftsfhrer: Wolfgang Erlmann, Hans-Dieter Schmidt
ATU-Job ID: 1707 078 page 2 of 4
4. Analysis results Tab.3: results in g/m
Parameter Titan1D9ixs2c mGmrade 5,
Titan Disc Grade 5 anodized, 19x2 mm
Al
280
Ba
19,8
B
8,5
Ca
512
Cr
<
Cu
<
Fe
28,7
Pb
<
Li
0,91
Mg
25,4
Mn
11,1
Ni
45
K
115
Na
79
Sr
10,0
Zn
9,9
TOC
680
13,1 2,6 6,6 607 < < 0,68 < 0,17 74 15,9 57 276 4890 4,2 20,1
<
The results written in red are off Spec. RL = reported limit
Stainless Steel Disc 1.4435, 30x2 mm
138 8,9 14,7 162 0,48 0,92 41,3 0,12 0,32 4,7 2890 1510 19,8 19,6 2,2 72
480
RL Spec.
0,50 10 0,25 15 1,00 30 0,50 20 0,25 1 0,25 15 0,25 5 0,05 1 0,05 2 0,25 5 0,05 5 0,25 1 0,25 15 0,25 15 0,05 0,5 0,25 10
250 60.000
ATU GmbH - Analytik fr Technik und Umwelt, Hertzstrasse 17, D-71083 Herrenberg, Postfach 1224, D-71071 Herrenberg Amtsgericht Stuttgart, HRB 244136, Geschftsfhrer: Wolfgang Erlmann, Hans-Dieter Schmidt
ATU-Job ID: 1707 078 page 3 of 4
Tab.4:results in pg/m2 Parameter
PTFE-Carbon-Cap
Al Ba B Ca Cr Cu Fe Pb Li Mg Mn Ni K Na Sr Zn
TOC
1,5 <
1,7 5,2
< 0,46 0,64
< < 0,72 < 0,10 3,0 5,3 < 1,3
4770
The results written in red are off Spec. RL = reported limit
With best regards
RL
Spec.
0,2
10
0,1
15
0,5
30
0,2
20
0,1
1
0,1
15
0,1
5
0,05
1
0,05
2
0,1
5
0,05
5
0,1
1
0,1
15
0,1
15
0,05
0,5
0,1
10
100
60.000
W. Erlmann
(
jeatu-lab.de)
si ned: (
The present results refer exclusively to the samples examined here. The copy of the examination report and/or the passing on to third parties is on permit only by our express approval
M. Reutz atu-lab.de)
ATU GmbH - Analytik fr Technik und Umwelt, Hertzstrasse 17, D-71083 Herrenberg, Postfach 1224, D-71071 Herrenberg Amtsgericht Stuttgart, HRB 244136, Geschftsfhrer: Wolfgang Erlmann, Hans-Dieter Schmidt
ATU-Job I D: 1707 078 page 4 of 4