Document BpMJq7gvMJag4m7q45v0rgOJ
European Semiconductor Industry Association
PFAS in the semiconductor industry Giulia Mancini, STMicroelectronics
June 15th 2022
ESIA Members
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The voice of the semiconductor industry
in Europe
Represent the interests of the European-based semiconductor industry and advocate for its international competitiveness most R&D-intensive sector highly-developed global supply chain fierce competition & price fluctuation short innovation cycles multiplier for growth, electronics boost innovation global market estimated at $ 556 billion in 2021 (+26.2% yoy) Europe strongest market for automotive (29%) EU
ca. 10% of global market direct employment 200.000 indirect up to 1.000.000 ESIA is member of the World Semiconductor Council (WSC)
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Semiconductors enable sustainable solutions
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The European semiconductor industry delivers innovative solutions to societal challenges
These solutions depend on the use and availability of specialty materials and chemicals
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The most complex and sophisticated manufacturing process in the world, incorporating a strictly controlled and safe production environment
500
manufacturing steps
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PFAS use by the semiconductor industry
Constituent of specialty process chemistry
formulations (photolithography, chamber
cleaning/etching, and other mixtures) Direct criticality > 13 types of distinct uses / material
functionalities
Semiconductor manufacturing equipment Heat Transfer Fluids Various articles tubing lining orings
Chemical distribution systems
Fluoropolymers in articles (component, wire, cables, printed circuit boards, batteries, insulators, capacitors, etc.)
Factory infrastructures Water purification, air treatment
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PFAS use by the semiconductor industry
Photolithography Specialty chemicals
PFAS are present as
surfactants resin constituent
Those chemicals have specific characteristics
to react with UV light prepare the semiconductor circuits specificity for specific devices
Etchant
to induce changes in the semiconductor structure
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PFAS use by the semiconductor industry
Refrigerant
Replacement for phased out chemicals with extremely high GWP Now these are included in the scope of PFAS as well
PFAS related substances in the assembly process
Glue in packaging
PFAS - other uses
Anti-corrosion chemical in pipelines and exhaust systems Fire Fighting Foams
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EU restriction Challenges and impacts
PFAS containing specialty formulations are a prerequisite for semiconductor manufacturing in Europe
Industry transitioned from PFOA & PFOS to short-chain PFAS specialty formulations (process chemistries)
Industry will remove PFHxA according to regulatory timeline Industry concerns
Broad current draft scope of EU restriction Global industry sector with a global supply chain
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Questions?
Thank you for your attention!
http://www.eusemiconductors.eu/
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