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European Semiconductor Industry Association PFAS in the semiconductor industry Giulia Mancini, STMicroelectronics June 15th 2022 ESIA Members 2 The voice of the semiconductor industry in Europe Represent the interests of the European-based semiconductor industry and advocate for its international competitiveness most R&D-intensive sector highly-developed global supply chain fierce competition & price fluctuation short innovation cycles multiplier for growth, electronics boost innovation global market estimated at $ 556 billion in 2021 (+26.2% yoy) Europe strongest market for automotive (29%) EU ca. 10% of global market direct employment 200.000 indirect up to 1.000.000 ESIA is member of the World Semiconductor Council (WSC) 3 Semiconductors enable sustainable solutions 4 The European semiconductor industry delivers innovative solutions to societal challenges These solutions depend on the use and availability of specialty materials and chemicals 5 The most complex and sophisticated manufacturing process in the world, incorporating a strictly controlled and safe production environment 500 manufacturing steps 6 PFAS use by the semiconductor industry Constituent of specialty process chemistry formulations (photolithography, chamber cleaning/etching, and other mixtures) Direct criticality > 13 types of distinct uses / material functionalities Semiconductor manufacturing equipment Heat Transfer Fluids Various articles tubing lining orings Chemical distribution systems Fluoropolymers in articles (component, wire, cables, printed circuit boards, batteries, insulators, capacitors, etc.) Factory infrastructures Water purification, air treatment 7 PFAS use by the semiconductor industry Photolithography Specialty chemicals PFAS are present as surfactants resin constituent Those chemicals have specific characteristics to react with UV light prepare the semiconductor circuits specificity for specific devices Etchant to induce changes in the semiconductor structure 8 PFAS use by the semiconductor industry Refrigerant Replacement for phased out chemicals with extremely high GWP Now these are included in the scope of PFAS as well PFAS related substances in the assembly process Glue in packaging PFAS - other uses Anti-corrosion chemical in pipelines and exhaust systems Fire Fighting Foams 9 EU restriction Challenges and impacts PFAS containing specialty formulations are a prerequisite for semiconductor manufacturing in Europe Industry transitioned from PFOA & PFOS to short-chain PFAS specialty formulations (process chemistries) Industry will remove PFHxA according to regulatory timeline Industry concerns Broad current draft scope of EU restriction Global industry sector with a global supply chain 10 Questions? Thank you for your attention! http://www.eusemiconductors.eu/ Twitter : @eSemiconductor LinkedIn: European Semiconductor Industry Association 11