Document 7R5jQNGnKQ7aNMrZxQJZY40ZE

To: OSHA File Interoffice Communication From: Date: Subject: Randy Istre April 12, 1990 Determination of 95% Confidence Limits as Required by OSHA VIS1A The analysis intervals for VCM at the 95% confidence level set forth by OSHA are shown below. The same criteria was applied to the EDC analysis; although OSHA has no such limits at this time. 0.0 to 0.5 ppm 50% 0.5 to 1.0 ppm 35% Over 1.0 ppm 25% Eight analyses of VCM and EDC standard gases at three different concentration levels were completed. The gases were tested at six hour exposure intervals. The statistical evaluation of these analyses are shown in the attached tables. All data for the vinyl analysis meets the required OSHA limits. Based on the data presented, only the upper limit of the .205 ppm EDC standard and the lower limits of the 3.85 ppm EDC standard lie outside the assumed OSHA concentration range and these by only .042 ppm and .115 ppm respectively. Ten blank wafers were also tested in an attempt to determine a corrected area for the EDC peaks. 1360 was subtracted from each area for EDC. We need improvement on this method next year. No further work will be done this year to verify the 95% confidence limits of this analysis. Randy Istre Laboratory Analyst lk cc; PLF vvv 000017854 TABLE I 95% Confidence Limit Determination For Vinyl Chloride .200 DDE! VCM Standard 1) .2287 2) . 1723 3) .2010 4) . 1917 5) .2093 6) . 1747 7) .2103 8) . 1477 9) .2063 N=9 i N=3 T=l.833 S=.0247 X=.1936 Upper limit =X + Lower limit =X OSHA Requirement >AN=.2087 i/Y N=. 1785 =.10 to .30 . 502 DDm VCM Standard 1) ,4923 2) .3793 3) .5417 4) .4507 5) .4823 6) .4487 7) .5003 8) . 3770 9) .4927 N=9 V N=3 T=1.833 S=.0553 X=.4628 Upper limit =X + Lower limit =X OSHA Requirement= i/vj N= .4 966 i/IN=.4290 6777 . 572 DDm VCM Standard 1) .5761 2) .4762 3) . 5783 4) . 4516 5) .6057 6) . 4751 7) . 6252 8) .4175 9) . 5703 N=9 Y N=3 T=1.833 S=.0755 X=.5307 Upper limit =X + Lower limit =X OSHA Requirement= iA N=.5768 J/Y N=. 4846 4.02: Dt>m VCM Standard 1) 4.3920 2) 3.7852 3) 4.1339 4) 3.5750 5) 4.1498 6) 3.8572 7) 4.3101 8) 2.7435 9) 4.3142 N=9 i N=3 T=1.833 S=.5189 X=3.9179 Upper limit =X + ts/lj N=4.2349 Lower limit =X - ts/Y N=3.6009 OSHA Requirement =4.02 + 25% =3.015 to 5 025 00O01TS55 VW TABLE II 95% Confidence Limit Determination For EDC .205 Dom EDC Standard 1) .2180 2) .2159 3) .2530 4) . 2607 5) .2238 6) .2119 7) . 4076 8) .2659 9) .5114 N=9 ^ N=3 T=l.833 S=.1041 X=.2854 , Upper limit = X + ts/v,N = .3490 Lower limit = X - ts/VN -- .2218 OSHA Requirement = .205 + 50% = . . 440 com EDC Standard 1) . 5189 2) .3344 3) .5262 4) .4513 5) .4479 6) .6606 7) .4584 8) .4676 9) . 5679 N=9 4 N=3 T=l.833 S--.0910 X=.4926 , Upper limit = X + ts/v,n -- .5482 Lower limit = X - ts/VN -- .4370 OSHA Requirement = .440 35% = . 2860 to .5940 .604 DDm EDC Standard 1) . 5994 2) .5178 3) . 7286 4) .4974 5) .5832 6) .5391 7) .5574 8) .3504 9) .5501 N=9 V N=3 T=1.833 S=.0995 X=.5470 , Upper limit = X 4- ts/V,N -- . 6078 Lower limit = X - ts/VN = .4862 OSHA Requirement = .604 + 35% = . 3.85i oom EDC Standard 1) 3.9192 2) 3.4721 3) 3.0827 4) 2.4975 5) 3.0601 6) 2.9987 7) 3.2597 8) 2.2139 9) 3.1950 N=9 V N=3 T=1.833 S=.5000 X=3.0777 , Upper limit = X + ts/YN = 3.3832 Lower limit = X - ts/v N -- 2.7722 OSHA Requirement = 3.85 + 25% = 2 VVV 000017856