Document wqXNDQxRRn3wyJLrmO1Bvg0D

Study on Alternatives for Fluoropolymers for Ultra-Pure Pumps and Flowmeters Doc. No. PR-4380-00 Revision 01 STUDY ON ALTERNATIVES TO FLUOROPOLYMERS FOR PUMPS AND FLOWMETERS FOR ULTRAPURE FLUID HANDLING IN MICROELECTRONICS PRODUCTION Authors: Dr. sc. techn. Natale Barletta Mr. Viktor Steinacher MSc ETH Zurich Dr. sc. techn. Thomas Gempp PURPOSE: This report gives a summary of the testing and study done on alternatives to fluoropolymers used in Levitronix pumps and flowmeters, which are used in ultrapure fluid handling circuits of equipment for chemical delivery and wet processing in Microelectronics (Semiconductor) manufacturing. SCOPE: Pumps and flowmeters for ultra-pure fluid handling. This document and its content is the property of Levitronix and shall not be reproduced, distributed, disclosed or used for manufacturing or sale of Levitronix products without the expressed written consent of Levitronix. 1 of 12 Study on Alternatives for Fluoropolymers for Ultra-Pure Pumps and Flowmeters Doc. No. PR-4380-00 Revision 01 Contents: 1 Introduction and Background ................................................................................................................... 3 1.1 Levitronix Products and Applications .................................................................................................................... 3 1.2 Ultrapure Fluid Handling in Semiconductor Production ......................................................................................... 4 1.3 PTFE and PFA ...................................................................................................................................................... 4 2 Main Requirements for Alternatives ......................................................................................................... 5 2.1 Chemical Resistance ............................................................................................................................................ 5 2.2 High Purity............................................................................................................................................................. 5 2.3 Low Permeability ................................................................................................................................................... 5 3 Study on Alternatives to PTFE and PFA .................................................................................................. 6 3.1 Stainless Steel and Titanium................................................................................................................................. 6 3.2 Glas and Ceramics................................................................................................................................................ 6 3.3 Polypropylene (PP) ............................................................................................................................................... 7 3.4 Polyethylene (PE, LDPE, HDPE) .......................................................................................................................... 9 3.5 Polyetheretherketon (PEEK) ............................................................................................................................... 10 4 Summary and Conclusions ..................................................................................................................... 11 4.1 Summary............................................................................................................................................................. 11 4.2 Conclusions......................................................................................................................................................... 11 5 References ................................................................................................................................................ 12 This document and its content is the property of Levitronix and shall not be reproduced, distributed, disclosed or used for manufacturing or sale of Levitronix products without the expressed written consent of Levitronix. 2 of 12 Study on Alternatives for Fluoropolymers for Ultra-Pure Pumps and Flowmeters Doc. No. PR-4380-00 Revision 01 1 Introduction and Background 1.1 Levitronix Products and Applications With more than 100,000 units Levitronix is the worldwide leader in magnetically levitated bearingless motor technology, specialized in supplying process equipment for Microelectronics (Semiconductor), Pharmaceutical and Bioprocessing. The products range from pump systems, mixers and blowers to ultrasonic flow sensors and viscometers. Levitronix products are enabler components for example for bioprocessing drugs like the corona vaccines and for manufacturing of high-tech chips for example for electric car vehicles and other devices for renewable energies. The technology of the bearingless motor permits a motor and a magnetic bearing to be combined into a single unit (see Table 1) with products that achieve maximum reliability, long life, and the ability to process in the harshest environments like for example pumping of aggressive chemicals for Semiconductor production. Inlet Maglev Motor Pump Casing Levitated Impeller Outlet Pump Head Rotor-Magnet Levitated Impeller Motor/Bearing Stator Motor/Bearing Winding Table 1: Bearingless motor technology for ultrapure pumps in Semiconductor production As a complementary product Levitronix is also producing non-invasive ultrapure ultrasonic flow sensors for Bioprocessing and Semiconductor manufacturing to enable full flow handling solutions. Flow IN ,,With-Stream" Wave Piezoelectric Transducer Piezoelectric Transducer ,,Against-Stream" Wave Flow OUT Table 2: Ultrasonic flow sensor technology for ultra-pure fluid handling Levitronix has been a key participant in the Microelectronics industry for over 20 years, providing ultrapure pump systems, mixers, and flow sensors that enable chip manufacturers globally to process smallest wafer structures. Levitronix is the market leader in several applications, including single-wafer processing (cleaning and etching), CMP slurry delivery, or plating. To meet the high purity demand in semiconductor manufacturing, wafer cleaning has become one of the most critical operations. Lowest particle contamination is of major importance to obtain a high yield and high efficiency of the usage of precious materials (rare earth) and aggressive chemicals. In comparison to Levitronix pumps, pneumatic pumps wear out due to friction of check valves, bellows, diaphragms, and other components. Wear can cause particle shedding that causes wafer defectivity. Furthermore, the pulsating flow of pneumatic pumps may reduce filters performance due to increased particle release. Levitronix pump systems are designed for demanding wet cleaning applications where ultrapure and pulsation-free processing ensure the highest yield. This document and its content is the property of Levitronix and shall not be reproduced, distributed, disclosed or used for manufacturing or sale of Levitronix products without the expressed written consent of Levitronix. 3 of 12 Study on Alternatives for Fluoropolymers for Ultra-Pure Pumps and Flowmeters Doc. No. PR-4380-00 Revision 01 1.2 Ultrapure Fluid Handling in Semiconductor Production As mega-trends, such as artificial intelligence and robotics, smart homes and smart cars, smart medical devices, and the Internet of Things evolve to meet growing needs for speed, scale, and reliability, they force integrated circuit (IC) manufacturers to increase processor power efficiency and memory size. At the same time, device manufacturers striving to meet new worldwide consumer and business data demands at lower costs and lower waste of precious materials face significant challenges in terms of process control, yield, and economics. Table 1 illustrates the history and the future demand to reduce the smallest wafer structures. 5nm small structures already became reality and 1 nm structures are under investigation. For the purity demand of fluid handling circuits this means that unpurities in the atomic size range must be considered during Microelectronics production. 5 nm: ~45 Silicon Atoms 1 nm: ~ 9 Silicon Atoms Table 3: History and outlook of gate pitches (smallest structures) of semiconductor chips According to the ITRS (International Technology for Semiconductors) roadmap (see REF 2 under "8 Yield Enhancement") the critical killer particle size in semiconductor chemistries at 10nm processing structures is 1 particle/ml for > 5nm particle sizes! To find a 5 nm particle on a 300 mm wafer is like looking for a disc with 0.4 m diameter on the Earth's surface! This demands increasing purity on processing chemistries and the wet materials used in fluid handling components like pumps, valves, sensors, tubings and fittings. The purity demand for semiconductor chemistries is approaching the ppq level (1 part per quadrillion): this is like finding a little fish in the San Francisco bay (see REF 1). This means that also the wet materials for the Levitronix pump heads have to meet the highest levels of purity even when pumping most aggressive chemicals. 1.3 PTFE and PFA During the last decades the fluoropolymers PTFE and PFA evolved as the only possible solution in fluid handling for microelectronics production. PTFE and PFA have unique chemical resistance properties against aggressive chemistries like strong acids, bases and solvents up to temperature of 200C (see REF 6, REF 7, REF 8, REF 9, REF 10). High purity grades of resins have been developed by companies like Chemours and Daikin, meeting the specific purity demand and barrier properties needed for ultrapure fluid handling with aggressive chemistries. The whole supply chain from resin manufacturers, to extruding, sintering and moulding suppliers down to the component's producers (like Levitronix) have designed and developed processes over more than 20 years in order to enable the manufacturing of those challenging materials. Hence Levitronix pump heads for microelectronics production are all produced with fluoropolymers like PFA or PTFE (for high temperature applications). This document and its content is the property of Levitronix and shall not be reproduced, distributed, disclosed or used for manufacturing or sale of Levitronix products without the expressed written consent of Levitronix. 4 of 12 Study on Alternatives for Fluoropolymers for Ultra-Pure Pumps and Flowmeters Doc. No. PR-4380-00 Revision 01 2 Main Requirements for Alternatives 2.1 Chemical Resistance When selecting alternative materials for ultrapure fluid handling, the first most important factor is that these must be perfectly resistant against the chemistries used in microelectronics wet production processes as wafer cleaning, wafer etching, chemical delivery and photolithography. The slightest attack of the wet material can cause contaminations resulting in expensive wafer losses. Table 4 shows some typical aggressive chemistries used in these applications. Name Hydrochloric Acid Hydrofluoric Acid Sulfuric Acid Phosphoric Acid Nitric Acid Perchloric Acid Acetic Acid Isopropyl Alcohol (IPA) Ammonium Hydroxide Sodium Hydroxide Potassium Hydroxide Acetone Xylene Hydrogen Peroxide Bromine Ozone Water Formula HCL HF H2SO4 H2PO4 HNO3 HClO4 CH3COOH C3H8O NH4OH NaOH KOH (CH3)2CO (CH3)2C6H4 H2O2 Br O3 + H2O2 Concentration Range up to 38% up to 48% > 98% > 85% up to 68% up to 70% No info. available up to 99.9% up to 25% up to 50& up to 50% up to 99.8% No info. available up to 30% No info. available up to 200 ppm Temperature Range 20 - 70 C 20 - 70 C 20 - 180C 20 - 180C 20 - 50 C No info. available No info. available 20 - 70 C 20 - 70 C No info. available up to 70C 20-50 C No info. available 20 - 70 C No info. available 20 - 40 C Semiconductor Process Type Wafer cleaning Wafer etching Wafer cleaning Wafer etching Wafer etching/cleaning Wafer cleaning Wafer etching Wafer cleaning Wafer cleaning Wafer etching Wafer etching Wafer cleaning Wafer cleaning Wafer cleaning No info. available No info. available PTFE / PFA Suitability Suitable Suitable Suitable Suitable Suitable Suitable Suitable Suitable Suitable Suitable Suitable Suitable Suitable Suitable Suitable Suitable Table 4: Typical chemicals used in chemical delivery and wet processing in semiconductor fabs Note 1: Mixtures of these chemistries (like "aqua regia" and "piranha" solutions) are used, which result in a higher aggressivity as the single components. Over the last 20 years Levitronix invested significantly in testing most of these liquids to show chemical compatibility and resistance of its pump heads made from PTFE and/or PFA to prove years of perfect operation. 2.2 High Purity The SEMI F57-0120 standard (see REF 3) specifies minimum performance requirement for ultra high purity polymer for ultrapure fluid handling in the Semiconductor industry. It defines ionic, TOC (total organic carbon) and metal limits in the lower g/m2 range. It has to be mentioned that high-end-chip manufacturers like Intel, Samsung and TSMC require much lower limits (sometimes non-detectable values) to get reasonable yields, when manufacturing 5 nm or smaller structures. To meet these levels organic and inorganic processing aids and additives are not allowed. Special moulding tools and cleaning procedures are required during the production process of the polymers, which in most present polymers other than PFA and PTFE are not available. 2.3 Low Permeability Excellent barrier properties are needed to avoid that aggressive chemicals are penetrating the environment through the fluid handling components. Furthermore, encapsulated parts like the Levitronix metallic rotor have to be protected by low permeable encapsulation (today PFA or PTFE) to avoid corrosion of the rotor which can result in severe contamination of wet processes. This document and its content is the property of Levitronix and shall not be reproduced, distributed, disclosed or used for manufacturing or sale of Levitronix products without the expressed written consent of Levitronix. 5 of 12 Study on Alternatives for Fluoropolymers for Ultra-Pure Pumps and Flowmeters Doc. No. PR-4380-00 Revision 01 3 Study on Alternatives to PTFE and PFA 3.1 Stainless Steel and Titanium Stainless Steel and specifically Titanium have a wide chemical resistance against acids, bases and solvents. However, at higher concentrations and temperatures of the aggressive chemicals these materials start to corrode. But the main problem is their tendency to release metallic ions even in water. The concentrations of these ions are significantly above the levels specified in SEMI F57-0120 standard (see REF 3). This has been verified by performing leachout testing at a 3rd party laboratory (see Test report REF 4). Pieces of two Titanium grades and Stainless Steel (1.4435) have been immersed 7 days in 85C ultrapure water. After 7 days the metal ions where measured and compared to the specifications in SEMI F57-0120 as shown in Table 5. Most of the ions measure where significantly above the level allowed (see red values in Table 5). Titanium showed significantly lower levels than Stainless Steel but still significantly above the allowed levels and furthermore Titanium is much too expensive. It must be emphasized that these values are even much higher if exposed to aggressive chemicals. Pump heads made from ultrapure PFA resin used in Levitronix pumps show no or only minor content of metal ions (see REF 5). Table 5: Metal ions measured for Titanium and Stainless Steel after 7 days immersion in 85C ultra-pure water Note 1: See for detailed report REF 4. Note 2: All red values are above the specification limits in SEMI-F57 (see right column labeled with Spec.). 3.2 Glas and Ceramics Glas and all ceramic types have a certain potential concerning the chemical resistance, but they are much too costly, almost impossible to be processed into big, precise and complicated structures like pump, valve and fitting parts. Furthermore, they are too brittle and delicate to be used. This document and its content is the property of Levitronix and shall not be reproduced, distributed, disclosed or used for manufacturing or sale of Levitronix products without the expressed written consent of Levitronix. 6 of 12 Study on Alternatives for Fluoropolymers for Ultra-Pure Pumps and Flowmeters Doc. No. PR-4380-00 Revision 01 3.3 Polypropylene (PP) One of the first candidates of non-fluoropolymers is polypropylene (PP). Polypropylene is well known to have a wide chemical resistance against a wide range of chemicals and at the same time is significantly less costly than PFA or PTFE. There are numerous general guidelines available (see REF 12, REF 13, REF 14, REF 15), which document the chemical resistance. Some of these guidelines have been studied to find out the suitability of polypropylene for the chemistries shown in Table 4. Table 6 illustrates that while polypropylene is resistant to a lot of chemicals at room temperature, its chemical resistance decreases significantly at increased temperature, which are key for many processes in the semiconductor production. Name Hydrochloric Acid Hydrofluoric Acid Concentration Range up to 38% up to 48% Sulfuric Acid > 98% Phosphoric Acid > 85% Nitric Acid up to 68% Perchloric Acid Acetic Acid Isopropyl Alcohol (IPA) Ammonium Hydroxide Sodium Hydroxide Potassium Hydroxide Acetone Xylene up to 70% No info. available up to 99.9% up to 25% up to 50% up to 50% up to 99.8% No info. available Hydrogen Peroxide up to 30% Bromine Ozone Water No info. available up to 200 ppm Temperature Range 20 - 70 C 20 - 70 C 20 - 180C 20 - 180C 20 - 70 C No info. available No info. available 20 - 70 C 20 - 70 C No info. available up to 70C 20-50 C No info. available 20 - 70 C No info. available 20 - 40 C Suitability for the Relevant Chemistry In general satisfactory for up to 60C. Satisfactory at 35% concentration and 21C temperature. Attack at 35% concentration and 60C temperature. Satisfactory at 98% concentration and 21-60C temperature. Severe attack at 98% concentration and 100C temperature. Satisfactory at 85% concentration and 21-60C temperature. Attack at 85% concentration and 100C temperature. Satisfactory for low concentrations (< 10%). Sever attack at higher concentrations. Poor resistance. Suitable for up to 60C. Suitable for up to 60C Suitable for up to 60C Suitable for up to 100C Suitable for up to 100C Marginal resistance. Attack at 21C and severe attack at 60C. Suitable for 21C temperature. Attack at 60C. Severe attack. Severe attack. Table 6: Chemical resistance properties of polypropylene Note 1: Analysis based on literature research (summary of REF 12, REF 13, REF 14, REF 15) As mentioned in Section 2.3, low permeability of chemical molecules through the plastic encapsulation of the impeller is at most important for its lifetime and to avoid the contamination of the semiconductor wet processes and hence failures in wafer processing. Levitronix did extensive testing at a 3rd party lab with various chemistries to determine the permeation rate of various materials (see REF 22). Table 7 summarizes the results for hydrochloride acid (HCL) at 35% concentration and various temperatures. Table 8 summarizes the results for hydrofluoric acid (HF) at 33% concentration and various temperatures. HCL and HF are very representative for permeation testing as they are widely used in liquid mixtures of wet semiconductor processes and chemical delivery systems. This document and its content is the property of Levitronix and shall not be reproduced, distributed, disclosed or used for manufacturing or sale of Levitronix products without the expressed written consent of Levitronix. 7 of 12 Study on Alternatives for Fluoropolymers for Ultra-Pure Pumps and Flowmeters Doc. No. PR-4380-00 Revision 01 Table 7: Permeation rates of HCL (35%) through various materials Note 1: Chart from testing at 3rd party by Levitronix (see REF 22). Table 8: Permeation rates of HF (33%) through various materials Note 1: Chart from testing at 3rd party testing organized by Levitronix (see REF 23). The fluoropolymers like PFA and PTFE have significantly better barrier properties compared to polypropylene and polyethylene. This translates into a faster attack of the impeller rotor and a significant lower lifetime, which is unacceptable in Semiconductor processing and delivery applications as it leads to very short maintenance intervals and high potential for expensive wafer losses. Concerning the purity properties of polypropylene, the main problem is that most resin types have additives (mostly tallow additives) to be better processable by injection moulding. These additives leach out over time when exposed to chemicals and cause a very high risk for contamination. The mechanical properties (for example tensile strength and the E-module) of a typical polypropylene (see REF 11) starts to decrease significantly at temperatures > 90C. This is a problem as Levitronix pump heads have to withstand static pressures significantly above 6 bar. This could be improved by additives, but this causes again high risk for potential contaminations. Hence polypropylene is not suitable for higher temperature fluids in semiconductor processing. This document and its content is the property of Levitronix and shall not be reproduced, distributed, disclosed or used for manufacturing or sale of Levitronix products without the expressed written consent of Levitronix. 8 of 12 Study on Alternatives for Fluoropolymers for Ultra-Pure Pumps and Flowmeters Doc. No. PR-4380-00 Revision 01 3.4 Polyethylene (PE, LDPE, HDPE) Polyethylene plastics (PE, LDPE or HDPE) have very similar properties like polypropylene. As for polypropylene there are numerous general guidelines available (see REF 16, REF 17, REF 18, REF 19), which document the chemical resistance. Some of these guidelines have been studied to find out the suitability of polyethylene for the chemistries shown in Table 4. Table 9 gives a similar picture as for polypropylene. While polyethylene is resistant to a lot of chemicals at room temperature, its chemical resistance decreases significantly at increased temperature. Name Hydrochloric Acid Hydrofluoric Acid Sulfuric Acid Phosphoric Acid Concentration Range up to 38% up to 48% > 98% > 85% Nitric Acid up to 68% Perchloric Acid up to 70% Acetic Acid No info. available Isopropyl Alcohol (IPA) Ammonium Hydroxide Sodium Hydroxide Potassium Hydroxide Acetone Xylene up to 99.9% up to 25% up to 50% up to 50% up to 99.8% No info. available Hydrogen Peroxide up to 30% Bromine Ozone Water No info. available up to 200 ppm Temperature Range 20 - 70 C 20 - 70 C 20 - 180C 20 - 180C 20 - 70 C No info. available No info. available 20 - 70 C 20 - 70 C No info. available up to 70C 20-50 C No info. available 20 - 70 C No info. available 20 - 40 C Suitability for the Relevant Chemistry In general satisfactory for up to 60C. In general satisfactory for up to 60C. Severe attack. Satisfactory at 60C. Not sufficient mechanical strength at higher temperatures. Satisfactory for concentrations < 30% and 60C temperature. Attack at > 30% and 60C temperature. Satisfactory for concentrations < 50% and 21C. Attack at 60C for < 50%. Suitable at < 10% for up to 60C. Attack at 60for > 10% at 60C. Suitable for up to 60C Suitable for up to 60C Suitable for up to 60C Suitable for up to 60C Suitable for up to 60C Server attack at 21-60C. Suitable for 21C temperature. Attack at 60C. Severe attack. Attack. Table 9: Chemical resistance properties of polyethylene Note 1: Analysis based on literature research (summary of REF 16, REF 17, REF 18, REF 19). According to Table 7 the barrier properties of PE are better than polypropylene but still inferior to the fluoropolymers. Concerning the purity and mechanical properties the same applies to polyethylene as for polypropylene. This document and its content is the property of Levitronix and shall not be reproduced, distributed, disclosed or used for manufacturing or sale of Levitronix products without the expressed written consent of Levitronix. 9 of 12 Study on Alternatives for Fluoropolymers for Ultra-Pure Pumps and Flowmeters Doc. No. PR-4380-00 Revision 01 3.5 Polyetheretherketon (PEEK) Polyetheretherketon (called PEEK) is a thermoplast known for its excellent robustness up to 200C. Table 4 shows a summary of the chemical resistance properties for the fluids mentioned in Table 4 based on the data mentioned in REF 12, REF 13. Name Hydrochloric Acid Hydrofluoric Acid Sulfuric Acid Phosphoric Acid Nitric Acid Perchloric Acid Acetic Acid Isopropyl Alcohol (IPA) Ammonium Hydroxide Sodium Hydroxide Potassium Hydroxide Acetone Xylene Hydrogen Peroxide Bromine Ozone Water Concentration Range up to 38% up to 48% > 98% > 85% up to 68% up to 70% No info. available up to 99.9% up to 25% up to 50% up to 50% up to 99.8% No info. available up to 30% No info. available up to 200 ppm Temperature Range 20 - 70 C 20 - 70 C 20 - 180C 20 - 180C 20 - 70 C No info. available No info. available 20 - 70 C 20 - 70 C No info. available up to 70C 20-50 C No info. available 20 - 70 C No info. available 20 - 40 C Suitability for the Relevant Chemistry Suitable for < 10% and up to 70C. Some effect at higher concentration and temperature. Severe attack. Severe attack. Suitable for up to 80% and 200C (no information for > 85%) Severe attack at concentrations > 10%. Suitable for up to 100C. Suitable for up to 100C. Suitable for up to 23C (no information for up to 70C) Suitable for up to 23C (no information for up to 70C) Suitable for up to 100C. Suitable for up to 100C. Suitable for up to 100C. Suitable for up to 23C (no information for higher temp.) Suitable but for up to 100C but no concentration information. Severe attack. Suitable for 23C but no information about concentrations. Some attack at elevated temperatures. Table 10: Chemical resistance properties of PEEK Note 1: Analysis based on literature research (summary of REF 12, REF 13). Unfortunately, PEEK has various deficits concerning its chemical compatibility for chemistries like Hydrofluoric Acid, Nitric Acid and Sulfuric Acid. This clearly limits its usage for Semiconductor wet processing application. PEEK can be injection molded, extruded, or pressed in blocks but it needs very complex know how and it is also very expensive. This document and its content is the property of Levitronix and shall not be reproduced, distributed, disclosed or used for manufacturing or sale of Levitronix products without the expressed written consent of Levitronix. 10 of 12 Study on Alternatives for Fluoropolymers for Ultra-Pure Pumps and Flowmeters Doc. No. PR-4380-00 Revision 01 4 Summary and Conclusions 4.1 Summary Some selected potential alternatives for the fluoropolymers PFA and PTFE have been studied and tested for their usage in wet Semiconductor processing in context with the Levitronix pumps and flowmeters. The study on these alternatives is very representative for further alternative polymers like PVC, CPVC, PPSU and others. All these alternatives cannot match the unique combination of properties of PFA and PTFE concerning chemical compatibility, purity, inertness and chemical barrier properties. The biggest problem is chemical resistance and connected to this the purity needed in ultrapure fluid handling. In the foreseeable future there is no alternative visible to fluoropolymers like PFA and PTFE for components used in ultrapure fluid handling for Microelectronics production. If alternatives should appear in the future (which is very unlikely at the moment) it would need further several years of tuning and adapting the whole supply chain from resin manufacturer, to resin processing (moulding, extruding and machining) and component suppliers to meet the high demand of purity and chemical resistance needed to manufacture high-tech chips for the present and future need in applications like smart phones, PC, data processing, Internet of Things, Artificial Intelligence, compact and efficient life science devices and electrical car vehicles. 4.2 Conclusions A ban of fluoropolymers from their application for ultra-pure fluid handling in microelectronics production would ban crucial enabler components like the Levitronix pumps and flowmeters and cause severe disruptions for manufacturing important high-tech chips. It would not only pose a high risk to companies like Levitronix but also lead to a regression in advanced technologies that enable modern life in Europe. A 5 or 12 year derogation to a ban does not make any sense as there are no alternatives today and no alternatives will be developed just for Europe. It would just mean that important technologies would leave the Swiss and European market towards USA and Asia. This document and its content is the property of Levitronix and shall not be reproduced, distributed, disclosed or used for manufacturing or sale of Levitronix products without the expressed written consent of Levitronix. 11 of 12 Study on Alternatives for Fluoropolymers for Ultra-Pure Pumps and Flowmeters Doc. No. PR-4380-00 Revision 01 5 References Reference # and Title or File REF 1: Clean Chemical Delivery Entegris Whitepaper 8524.pdf REF 2: ITRS 2.0 Technology Roadmap 2015.pdf REF 3: Semi F57-0120 2020.pdf REF 4: Leachout Testing Steel vs Titan vs PTFE Carbon Semi-F57 ATU Test 1 - 2017-08-04.pdf REF 5: Leachout Testing LPP-600.29 Semi-F57 Balazs 2021-06-16.pdf REF 6: REF 7: REF 8: REF 9: REF 10: REF 11: PFA Chemical Compatibility Bartle Data.pdf PFA Chemical Compatibility CPLabSafety Data.pdf PTFE Dupont Handbook H-37051-3 PTFE Chemical Compatibility Bartle Data.pdf PTFE Chemical Compatibility CPLabSafety Data.pdf PP Datasheet Flinthills 2017-02 REF 12: PP Chemical Compatibility Ineos Data.pdf REF 13: REF 14: REF 15: PP Chemical Compatibility CPLabSafety Data.pdf PP Chemical Compatibility Celltreat Data.pdf PP Chemical Compatibility Prinsco Data.pdf REF 16: PE Chemical Compatibility Ineos Data.pdf REF 17: REF 18: REF 19: REF 20: REF 21: REF 22: REF 23: PE Chemical Compatibility CPLabSafety Data.pdf PE Chemical Compatibility Equistar Data.pdf PE Chemical Compatibility Craemer Data.pdf PEEK Chemical Compatibility Victrex Data.pdf PEEK Chemical Compatibility CPLabSafety Data.pdf Permeation Testing CTA Report LTX 1092 2299.pdf Permeation Testing CTA Report LTX 1098 2118.pdf Note White paper from Entegris emphasizing the purity in ultrapure fluid handling. International Technology Road Map established by a group of semiconductor industry experts. Specifications for high purity polymer materials for ultrapure fluid handling in semiconductor industry. Leachout testing, organized by Levitronix at a 3rd party laboratory to measure metal ion contamination in ultrapure water with Stainless Steel and Titanium. Leachout testing, organized by Levitronix at a 3rd party laboratory to measure metal ion contamination in ultrapure water with a PFA pump head. Chemical compatibility data from Schmidt-Bartle for PFA. Chemical compatibility data from CPLabSafety for PFA. Handbook of Dupont about properties of PTFE. Chemical compatibility data from Schmidt-Bartle for PTFE. Chemical compatibility data from CPLabSafety for PFA. Datasheet of a polyproplene type at Flinthills. Chemical compatibility data from Ineos for polypropylene. This polyproplene is used in the Levitronix pump heads for life science, where the chemicals are diluted or have low aggressivity and the temperature is below 40C. Chemical compatibility data from CPLabSafety for polypropylene. Chemical compatibility data from CELLTREAT Scientific Products for polypropylene. Chemical compatibility data from Prinsco for polypropylene. Chemical compatibility data from Ineos for polyethylene (HDPE). This polyethylene is used in the Levitronix mixer cups for bioprocessing, where the chemicals are diluted or have low aggressivity and the temperature is below 40C. Chemical compatibility data from CPLabSafety for polyethylene. Chemical compatibility data from Equistar for polyethylene. Chemical compatibility data from Craemer for polyethylene. Chemical compatibility data for PEEK Victrex. Chemical compatibility data from CPLabSafety for PEEK. Test report of permeation testing of various materials with HCL done at 3rd party by Levitronix. Test report of permeation testing of various materials with HF done at 3rd party by Levitronix. Table 11: List of reference documents This document and its content is the property of Levitronix and shall not be reproduced, distributed, disclosed or used for manufacturing or sale of Levitronix products without the expressed written consent of Levitronix. 12 of 12