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SEMI F57-0120 SPECIFICATION FOR HIGH PURITY POLYMER MATERIALS AND COMPONENTS USED IN ULTRAPURE WATER AND LIQUID CHEMICAL DISTRIBUTION SYSTEMS This Standard was technically approved by the Liquid Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on August 19, 2019. Available at www.semiviews.org and www.semi.org in January 2020; originally published October 2000; previously published March 2014. NOTICE: This Document was completely rewritten in 2019. 1 Purpose 1.1 This Document specifies minimum performance requirements for ultra high purity (UHP) polymer materials and components suitable for conveying ultrapure water (UPW) in UPW distribution systems. Further information regarding UPW systems can be found in SEMI F61, SEMI F63. 1.2 It also provides recommendations for the use of polymer materials and components used in UHP liquid chemical distribution systems (LCDS). Such distribution systems covered in this Document include bulk supply, facility distribution, and process equipment applications. 1.3 Although the requirements of this Document focus on testing materials and components with UPW at elevated temperatures, there could be other applicable chemicals, such as caustics and oxidizers, which users of this Document might like to consider. However, defining the vast number of testing parameters for each possible liquid chemistry stream is beyond the scope of this Document. Nevertheless, this Document intends neither to exclude nor to limit the possibility that suppliers and end-users might test with chemicals other than UPW or with other temperature conditions and, at the same time, set their own internal limits separate from the requirements within this Document. 2 Scope 2.1 This Specification focuses on polymer material and component performance and validation. Operational requirements to ensure polymer materials and components meet the intent of this Document are provided where appropriate. A summary list follows: 2.1.1 Quantitative Measures of Compliance Metallic Contribution Limits Ionic Contribution Limits Total Organic (Oxidizable) Carbon Contribution Limits Surface Roughness Limits 2.1.2 Qualitative Measures of Compliance Mechanical Properties Physical Properties Chemical Resistance Reliability Traceability Requirements Packaging Requirements Certification 1 SEMI F57-0120 SEMI 2000, 2020 2.2 This Specification pertains to polymer materials and components consisting of but not limited to the items shown in Table 1 are designed to contain and supply the following, but not limited to, the types of liquid chemicals listed below: UPW Acids, bases and oxidizers Aqueous salt solutions Solvents 2.3 Polymer materials and components that meet the requirements specified in this Document shall be considered suitable for UPW and LCDS as described in 1.3. Refer to SEMI C90 for additional requirements for the use of polymers in LCDS. NOTE 1: The following materials have shown the potential to comply with the requirements of this Specification: perfluoroalkoxy (PFA), polytetrafluoroethylene (PTFE), ethylene-tetrafluoroethylene copolymer (ETFE), polychlorotrifluoroethylene (PCTFE), polyvinylidene fluoride (PVDF), and copolymers, and ethylene-chlorotrifluoroethylene copolymer (ECTFE). However, unique design specifications or new materials may result in instances where significant efficiencies may be achieved while maintaining substantially equivalent performance. Care must be taken to ensure that the materials are compatible with the liquid streams (as shown in 2.2) for long-term applications. Additionally, it is important that the materials used be compatible with the application temperature or methods for bacterial reduction such as ozone, UV light or other sanitizing agents. 2.4 Unless purchased separately, polymer components constructed of sub-pieces, such as O-rings, gaskets, and diaphragms, must meet the requirements of this Document at the functional component level, not as individual subpieces. For example, an O-ring in a union must not degrade the overall quality of the union such that it fails to meet the requirements of this Document. Alternative spare parts used in direct fluid contact and purchased separately, such as gaskets and O-rings, must meet this Standard, if applicable. NOTE 2: A flowing stream concentration can be estimated for a component if the static leach out value, fluid velocity and component inner diameter are known. This value is known as the theoretical dynamic concentration (TDC) and is expressed in parts per billion (g/liter). Information on how to determine the TDC can be found in the Related Information 1 section of this Document. 2.5 This Document and associated tests specify wetted stream performance requirements for polymer components in an as supplied, native state and reflect the current process on record for the polymer component manufacturers. NOTICE: SEMI Standards and Safety Guidelines do not purport to address all safety issues associated with their use. It is the responsibility of the users of the Documents to establish appropriate safety and health practices, and determine the applicability of regulatory or other limitations prior to use. 3 Limitations 3.1 This Document applies solely to polymer materials and components. NOTE 3: Performance specifications for subassemblies or process equipment may be found in other SEMI Standards (see Related Documents, 4.1). 3.2 This Document does not include specifications for, UV sterilization systems, reverse osmosis systems sensors (non-direct fluid contact), monitors (sampling devices with no return stream), ultra-filtration equipment or other ancillary equipment. 3.3 This Document can apply to polymers used in chemical delivery systems. Note that SEMI F57 only considers extraction in UPW. Polymers used in UHP chemical systems may require further investigation. 3.4 Polymer materials and components described within this Document are intended for use in UHP service only. Their specified performance requirements may exceed the needs of materials and components used in drainage and other lesser quality liquids. 3.5 The tests referenced in this Document are designed to assess contamination from the polymer materials and components in an as received state. Assembly steps, such as welding and cleaning, may add some contaminants. The effects of the assembly are beyond the scope of this document but should be considered by the supplier or user (see SEMI E49). SEMI F57-0120 SEMI 2000, 2020 2 sem r 3.6 Components considered within this Document ultimately are joined together to form a piping system. Therefore, the nature of the materials dictate that a variety of connection practices ranging from mechanical to fusion techniques will be used. 3.7 Leach out values listed in Tables 2, through 4 reflect testing in UPW only. The relative leach out performance of polymer materials and components in use with other chemicals (e.g., acids and bases) cannot be directly derived using this data. It is incumbent upon the user to determine if a component is suitable for use based on these requirements (see 1.3). 3.8 This Document is not intended to supersede international, national or local codes, regulations, and laws. Each should be consulted to ensure that the manufactured polymer components meet regulatory requirements in each location. NOTE 4: Organic flammable solvents can pose a safety risk when being transported in nonconductive polymer components due to static discharge. Care must be taken when using polymeric components with flammable solvents. 4 Referenced Standards and Documents 4.1 SEMI Standards and Safety Guidelines SEMI C69 -- Test Method for the Determination of Surface Areas of Polymer Pellets SEMI C90 -- Test Methods and Specification for Testing Perfluoroalkoxy (PFA) Materials Used in Liquid Chemical Distribution Systems SEMI E49 -- Guide for High Purity and Ultrahigh Purity Piping Performance, Subassemblies, and Final Assemblies SEMI F40 -- Practice For Preparing Liquid Chemical Distribution Components for Chemical Testing SEMI F61 -- Guide to Design and Operation of a Semiconductor Ultrapure Water Systems SEMI F63 -- Guide for Ultrapure Water used in Semiconductor Processing 4.2 ASTMStandardsl ASTM D4327 -- Anions in Water by Chemically Suppressed Ion Chromatography ASTM D4779 -- Total, Organic, and Inorganic Carbon in High Purity Water by Ultraviolet (UV) or Persulfate Oxidation, or Both, and Infrared Detection ASTM D5904 -- Standard Test Method of Total Carbon, Inorganic Carbon, and Organic Carbon in Water by UV, Persulfate Oxidation and Membrane Conductivity Detection 4.3 ISO Standard2 ISO 4287 -- Geometrical Product Specifications (GPS) -- Surface Texture: Profile Method -- Terms, Definitions and Surface Texture Parameters 4.4 SEMATECH Document3 SEMASPEC 92010936B-STD --Provisional Test Method for Determining Leachable Trace Inorganics in Ultra Pure Water Distribution System Components NOTICE: Unless otherwise indicated, all documents cited shall be the latest published versions. 5 Terminology 5.1 Abbreviations and Acronyms 5.1.1 ALD -- atomic layer deposition ' ASTM International, 100 Barr Harbor Drive, West Conshohocken, PA 19428-2959, USA; Telephone: , Fax: http://www.astm.org 2 International Organization for Standardization, ISO Central Secretariat, BIBC II, Chemin de Blandonnet 8, CP 401, 1214 Vernier, Geneva, Switzerland; Telephone: +41.22.749.01.11, http://www.iso.org 3 SEMATECH, 257 Fuller Road, Suite 2200, Albany, NY 12203, USA; Telephone: http://www.sematech.org 3 SEMI F57-0120 SEMI 2000, 2020 5.1.2 ECTFE -- ethylene-chlorotrifluoroethylene copolymer 5.1.3 ETFE -- ethylene-tetrafluoroethylene copolymer 5.1.4 ICP-MS -- inductively coupled plasma mass spectrometry 5.1.5 LCDS -- liquid chemical distribution systems 5.1.6 PCTFE -- polychlorotri-fluoroethylene 5.1.7 PEEK -- polyether-etherketone 5.1.8 PFA -- perfluoroalkoxy 5.1.9 PP -- polypropylene 5.1.10 PTFE -- polytetrafluoroethylene 5.1.11 PVC -- polyvinyl chloride 5.1.12 PVDF -- polyvinylidene fluoride 5.1.13 TDC -- theoretical dynamic concentration 5.1.14 TOC -- total organic carbon 5.1.15 UHP -- ultra high purity 5.1.16 UPW -- ultrapure water 5.2 Definitions 5.2.1 liquid chemical distribution system (LCDS) -- the collection of components and subsystems used to control and deliver liquid process chemicals from a source location to a point of use in a semiconductor manufacturing facility. 5.2.2 microelectronic devices -- extremely small electronic devices that consume very little electric power and encompass a variety of components used in normal electronic design. They are available individually or, in some cases, combined on a single substrate as transistors, capacitors, inductors, resistors, diodes, insulators, conductors, digital and analog integrated circuits, and microelectronic machines (MEMS), to name a few. Examples of such electronic components are found in computers, cell phones, televisions, photovoltaic solar panels, etc. 5.2.3 ultrapure water distribution system -- the collection of components and subsystems used to deliver ultrapure water from a source location to a point of use. 6 Purity Requirements 6.1 High purity testing is performed per SEMI F40 with purity requirements defined in Tables 2 through 4 within the SEMI F57 Document. Please note, the values in the Table 2, Table3, and Table 4 below were derived using the highest surface area component, pipe. Material and components required to be tested for purity can be found in Table 1. NOTE 5: For other components which have significantly smaller surface area and whose values may differ from those in the table please refer to the Related Information 1 and Related Information 2 for guidance on how to evaluate the effect of the contamination. Table 1 Required Testing by Material and Component Type#1 Type Pellets#2 Pneumatic Valves Electronic Valves Manual Valves Check Valves Flow Meters: No moving parts Flow Meters: With moving parts Ionic Contamination (see 6.8) Metallic Contamination (see 6.9) TOC (see 6.10) SEMI F57-0120 SEMI 2000, 2020 4 Type Ionic(Cseoenta6m.8in)ation Flow Controllers Pneumatic Pilot Regulators Manual Regulators Tubing Filter Housings Degas Modules Gauge Guards Fittings Filters Piping Tank/Vessels/Drums#3 Sensors: With moving parts Sensors: No moving parts Pumps #1 . #2 Pellet Surface area can be determined following the procedures defined in SEMI C69. #3 Component testing for extractables is not currently covered by SEMI F40. Metallic Contamination (see 6.9) TOC (see 6.10) 6.2 To prevent the possibility that the results of a leached component or polymer material might become diluted beyond reporting limits of the instrument, where possible, the component or material surface area to volume ratio of the leaching solution should provide a reporting limit less than or equal to 50% of the specification value. 6.3 In the event the geometry of the material results in the reporting limit exceeding 50% but under 100% of the specification value, the data can be used provided no other option exists at the time to improve the reporting limits. At no time will a reporting limit exceeding 100% of the specification value be considered. In the event the part geometry is such that the reporting limit cannot be reduced below 100% of the specification value, testing a part of similar construction and manufacturing practices can be considered as an alternative solution should be of a similar geometry, while still meeting the reporting limit requirements of less than 100% of the specification value. 6.4 When testing small components, if the solution volume is insufficient to perform the required tests, multiple components can be used to obtain the required solution volume. 6.5 The components selected for testing should be supplied in the packaging used in normal production and reflect the current manufacturing capabilities of the supplier. 6.6 When reporting contamination (ionic, metals and TOC), the measured values are reported if above the respective reporting limits as described in 6.3. In the case where the measured value is below the reporting limit, a less than the reporting limit (<RL) is reported. All measured values and reporting limits when reported will be in the units of micrograms of contamination per unit surface area in meters squared (g/m2). 6.7 Ionic Contamination 6.7.1 Importance of Test -- Ionic contamination can have a corrosive or etching effect on microelectronic devices and other critical surfaces during fabrication, causing immediate or future device failure. Evaporation of solutions containing ionic contamination may leave surface residue. 6.7.2 Ionic contamination testing is required for high purity polymer materials and components as shown in Table 1. 6.7.3 Polymer materials and components shall conform to the ionic contamination specifications appearing in Table 2 when prepared per SEMI F40 and analyzed following the procedures defined in ASTM D4327 or equivalent. 5 SEMI F57-0120 SEMI 2000, 2020 Table 2 Surface Extractable Ionic Contamination Requirements Ionic Contamination Limits Ionic Contaminant Ionic Extraction Limits (g/m2) Ammonium#1 100 Bromide Chloride Fluoride Nitrate Nitrite Phosphate Sulfate 100 100 20000 100 100 100 100 #1 Ammonium is newly added in this revision. This should be a note vs a table note. 6.7.4 The testing temperature is specified to achieve comparable data for polymer materials and components and is not indicative of service temperatures. 6.8 Metallic Contamination 6.8.1 Importance of Test -- Metallic contamination can alter the electrical properties of microelectronic devices and can have a corrosive or etching effect on microelectronic devices and other critical surfaces during fabrication, causing immediate or future device failure. 6.8.2 Metallic contamination testing is required for high purity polymer materials and components as shown in Table 1. 6.8.3 Polymer materials and components shall conform to the metallic contamination specifications appearing in Table 3 when prepared per SEMI F40 and analyzed using inductively coupled plasma mass spectrometry (ICP-MS). Table 3 Surface Extractable Metallic Contamination Requirements Metallic Contaminant Aluminum Arsenic#1 Antimony#1 Barium Boron Cadmium#1 Calcium Chromium Copper Iron Lead Lithium Magnesium Manganese Nickel Potassium Sodium Strontium Metallic Extraction Limits (g/m2) 5 2 2 15 30 2 10 1 10 5 1 2 2 SEMI F57-0120 SEMI 2000, 2020 6 Metallic Contaminant Metallic Extraction Limits (g/m2) Titanium#1 Tin#1 Vanadium#1 Zinc #1 Indicates newly added elements to SEMI F57 in this revision. Make this a note not a table note. 6.9 Total Organic Carbon (TOC) 6.9.1 Importance of Test -- TOC can have an effect on semiconductor processing including silicon oxidation, uniformity of etching, cleaning (including wafers and masks), adhesion, gate oxide breakdown voltage, epitaxy, atomic layer deposition (ALD), CVD of silicon nitride or other thin film deposition steps. TOC is a screening method, and while low TOC values set a maximum level of TOC in water, the effects of the individual compounds can depend of the structure of the molecules, and the process. Compounds that leave residues may be more detrimental than very water soluble and volatile compounds (e.g., isopropanol). In addition, TOC added to ultrapure water can be a nutrient to increase the growth of bacteria in water systems. As many methods might be required to assess the identification of all organic contaminants, TOC is a practical screening method to assess total organics present, and if low, further testing typically is not needed. 6.9.2 TOC specification and testing are required for polymer materials and components as shown in Table 1. 6.9.3 Polymer materials and components shall conform to the TOC contamination specifications appearing in Table 4 when prepared per SEMI F40 and analyzed following the procedures defined in ASTM D4779 or ASTM D5904 or equivalent. Table 4 Surface Extractable TOC Contamination Requirements TOC Contamination Limit Contaminant TOC TOC Extraction Limit (g/m2) 6.10 Surface Roughness 6.10.1 Importance of Test -- Surface roughness can influence microbial proliferation, provide an entrapment area for microcontamination build-up or promote shedding of the polymer itself within a distribution system. 6.10.2 All components shown in Table 1 with the exception of pellets and tanks, vessels, drums, degas units, gauge guards, sensors (all) and filters will be tested for surface roughness. Only surfaces in direct contact with liquid chemicals as defined in 2.2 need to be tested for surface roughness. 6.10.3 Polymer components to be tested for surface roughness shall conform to surface roughness specifications appearing in Table 5 as required by the end user. ISO 4287 defines the test method to be used when conducting surface roughness measurements. 6.10.4 The product descriptions found in Table 6 describe the manufacturing processes used to produce plastic components. Extruded products are represented by components such as pipe and tubing. Injection molded products are represented by components such as fittings, valves, housings and pumps. A machined component is one produced by machining plastic stock or by a post-mold machining operation used to define a specific component characteristic, such as a valve seat. 6.10.5 It is understood that surface roughness will vary with the manufacturing process. The surface roughness values are based on what is believed obtainable when good manufacturing methods are being practiced. 7 SEMI F57-0120 SEMI 2000, 2020 Table 5 Surface Roughness Requirements Description Ra max. Value#1, #2 m (in) Extruded Pipe (<250 mm OD) Extruded Pipe mm OD) 0.25 ( 10) 0.45 ( 18) Injection Molded (<250 mm OD) mm OD) Machined (<250 mm OD) mm OD) 0.35 ( 14) 0.50 ( 20) 0.60 ( 24) 1.00 ( 40) #1 Units in (in) are rounded approximations. #2 The polymer component method for surface roughness testing is ISO 4287 (see 6.10.3). 6.10.6 Surface roughness will be calculated as the arithmetic mean Deviation (Ra) with measured values reported in microinches and/or micrometers (m). 6.10.7 Surface roughness measurements are to be taken in areas that best represent the bulk of the wetted surface of the component. Surface roughness measurements of post machined surfaces are only necessary if the total machined surface area is greater than 25% 7 Analytical Requirements 7.1 Requirements for all of analytical procedures are defined in SEMI F40. 8 Test Methods 8.1 Test methods, including materials preparation, reporting and calculation of results are defined in SEMI F40. 9 General Specifications for Polymer Materials and Components 9.1 Due to purity and traceability issues, reprocessed or regrind materials must not be used by the manufacturer when making polymer components intended to meet this Specification. 9.2 Upon request, suppliers of polymer materials and components shall provide data or information about their products. This information is typically found in product catalogs, component data sheets or other published literature. Where applicable, the end user may request information including the test methods used, component failure analysis, Tables 6 and 7 show examples of the type of data an end user might request. Table 6 Typical Specifications for Polymeric Materials Specification Physical and Mechanical Properties Chemical Resistance Properties Thermal Properties Permeability Examples Tensile, flexural, impact, hardness, aging, crystallinity, clarity Chemical resistance rating (material, media, concentration and temperature) Melting point, Vicat, Tg, Decomposition Permeation rate (time, temperature, pressure, thickness, media) Table 7 Typical Specifications for Polymeric Components Specification Dimensional Tolerances Flow Characteristics Leak Integrity Mechanical Strength Characteristics Examples Diameter, wall thickness, length, width and height, ovality Flow coefficient (Cv or Kv), computational fluid dynamics (CFD) analysis, flow rate range Pressure decay, leak across seat, leak to ambient Burst pressure, weld strength, side loading, pull out strength, deflection SEMI F57-0120 SEMI 2000, 2020 8 Specification Electrical and Optical Characteristics Temperature and Pressure Rating Chemical Resistance Properties Reliability and Performance Data Examples Current draw, electrical emissions Hydrostatic resistance, lower and upper temperature (media) limit, ambient temperature, pressure vs. temperature curve Chemical resistance rating (material, media, concentration and temperature) Life cycle testing, response time reliability in DIW and chemicals, valve membrane fatigue, membrane deformation, membrane pin pullout 10 Component Performance Validation 10.1 The supplier is responsible for defining, establishing, and executing a testing program for polymer materials and components based on the requirements outlined within this Document. 10.2 The testing program will specify the frequency of testing, the test material or component(s) or both, and the tests to be conducted. 10.3 The testing program should include a plan that identifies any corrective actions required in the event a test material or component fails to meet these requirements. 10.4 The supplier is not required to test polymer materials or components shipped from each individual lot. The supplier is also not required Instead, the supplier shall select materials or components considered representative of product(s) having similar processing or production techniques. Samples shall be randomly selected from a population that reflects current 10.5 The supplier is responsible for maintaining and supplying documentation that demonstrates its polymer materials or components consistently meet the requirements of this Document. A sample summary report form is provided in Appendix 1 to help summarize key information to be included when validating compliance to SEMI F57. The use of this form is optional and may be requested by the customer. 11 Traceability Requirements 11.1 It is the responsibility of the supplier to establish procedures to maintain an incoming raw material certification, inspection, and traceability process that will ensure manufactured polymer materials and components meet the requirements of this Document. 11.2 Each deliverable item shall have some scheme of identification on the material, component, exterior bag, or box so that traceability is provided from the raw material to the final finished, packaged product. 11.3 In the event that component installation by the purchaser removes or obliterates such identification, it becomes the responsibility of the purchaser to maintain identification records. 12 Packaging for Polymer Components 12.1 All pipe and tubing open ends will be capped, plugge on fittings or component end connections is at the discretion of the manufacturer. 12.2 Double bagging using a transparent material that will allow for visual inspection is the preferred method of packaging for all components. It is recommended that both the inner and outer bags be heat-sealed to prevent contamination and damage from normal hanRLing. Vacuum sealing, air evacuation, or dry inert gas purging are optional procedures that can be used for the inner bag. 12.3 It is recommended that a clean room compatible bag that limits particulate and other contamination be used for the inner bag. Packaging selection should consider the intended use of the product being packaged and the end use requirements dictated by the customer. 12.4 The outer bag will have a label affixed which clearly identifies the component, part number, serial number and any other necessary traceability characteristics (see 9). 9 SEMI F57-0120 SEMI 2000, 2020 12.5 In the event double bagging is not feasible, alternative packaging that ensures the cleanliness of the product can be considered. 12.6 Materials and intermediate stock shapes do not require double bagging and will be packaged in a means that protects the integrity of the product. 12.7 Shipping containers and cartons must provide adequate protection of polymer materials and components so those articles will meet the requirements contained within this Document upon delivery to the purchaser. NOTE 6: Some packaging materials contain slip agents and anti-blocking additives that can contribute to TOC and metals contamination. It is advised that part contamination from direct contact of the part with the bag, or while heat-sealing the bag can occur if such agents are present on the bag surface. It is recommended that the packaging materials should be chosen to minimize this type of contamination while in storage. 13 Components Ordering Information 13.1 to specify component performance requirements to equipment suppliers. Facilities, services and process equipment suppliers may also use this Document to specify performance requirements to component and subassembly suppliers. Component and subassembly suppliers may also use this Document to specify performance requirements for polymer material suppliers. 14 Related Documents 14.1 SEMI Standards and Safety Guidelines SEMI F104 -- Particle Test Method Guide for Evaluation of Components Used in Ultrapure Water and Liquid Chemical Distribution Systems SEMI S2 -- Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment 14.2 ASTM Standards1 ASTM D1784-08 -- Standard Specification for Rigid Poly(Vinyl Chloride) (PVC) Compounds and Chlorinated Poly(Vinyl Chloride) (CPVC) Compounds ASTM D3222-05 -- Standard Specification for Unmodified Poly(Vinylidene Fluoride) (PVDF) Molding Extrusion and Coating Materials ASTM D3275-08 -- Standard Classification System for E-CTFE-Fluoroplastic Molding, Extrusion, and Coating Materials ASTM D3307-08 -- Standard Specification for Perfluoroalkoxy (PFA)-Fluorocarbon Resin Molding and Extrusion Materials ASTM D4101 -- Propylene Plastic Injection and Extrusion Materials ASTM D5127 -- Standard Guide for Ultrapure Water used in Electronics and Semiconductor Industry ASTM D5575-07 -- Standard Classification System for Copolymers of Vinylidene Fluoride (VDF) with Other Fluorinated Monomers 14.3 CEN Standards4 PREN 1452-1 -- Plastics Piping Systems for Water Supply - Unplasticized Poly (Vinyl Chloride) (PVC-U) Part 1: General PREN 1452-2 -- Plastics Piping Systems for Water Supply - Unplasticized Poly (Vinyl Chloride) (PVC-U) Part 2: Pipes PREN 1452-3 -- Plastics Piping Systems for Water Supply - Unplasticized Poly (Vinyl Chloride) (PVC-U) - Part 3: Fittings 4 European Committee for Standardization, Avenue Marnix 17, B-1000 Brussels; Telephone: +32.2.550.08.11, Fax: +32.2.550.08.19, http://www.cen.eu SEMI F57-0120 SEMI 2000, 2020 10 PREN 1452-4 -- Plastics Piping Systems for Water Supply - Unplasticized Poly (Vinyl Chloride) (PVC-U) - Part 4: Valves and Ancillary Equipment PREN 1452-5 -- Plastics Piping Systems for Water Supply - Unplasticized Poly(Vinyl Chloride) (PVC-U) - Part 5: Fitness for Purpose of the System PREN 12202-1 -- Plastics Piping Systems for Hot and Cold Water - Polypropylene (PP) - Part 1: General PREN 12202-2 -- Plastics Piping Systems for Hot and Cold Water - Polypropylene (PP) - Part 2: Pipes PREN 12202-3 -- Plastics Piping Systems for Hot and Cold Water - Polypropylene (PP) - Part 3: Fittings PREN 12202-5 -- Plastics Piping Systems for Hot and Cold Water - Polypropylene (PP) - Part 5: Fitness for Purpose of the System 14.4 DIN Standards5 DIN 16774-1 -- Plastic Moulding Materials; Polypropylene and Propylene Copolymer Thermoplastics; Classification and Designation DIN 3442-1 -- Fittings of PP (Polypropylene); Requirements and Testing DIN 3442-2 -- Fittings of PP (Polypropylene); Ball Valves, Dimensions DIN 3442-3 -- Polypropylene (PP) Valves; Diaphragm Valves; Dimensions DIN 8077 -- Polypropylene (PP) Pipes PP-H 100, PP-B 80; PP-R 80 - Dimensions DIN 8078 -- Polypropylene (PP) Pipes - PP-H (Type 1), PP-B (Type 2), PP-R (Type 3) - General Quality Requirements and Testing 14.5 ISO Standards2 ISO 10931:2005 -- Plastic Piping Systems for Industrial Applications - Poly(vinylidene fluoride) (PVDF) - Specification for Components and the System ISO/DIS 15874-1 -- Plastics Piping Systems for Hot and Cold Water - Polypropylene (PP) - Part 1: General ISO/DIS 15874-2 -- Plastics Piping Systems for Hot and Cold Water - Polypropylene (PP) - Part 2: Pipes ISO/DIS 15874-3 -- Plastics Piping Systems for Hot and Cold Water - Polypropylene (PP) - Part 3: Fittings ISO/DIS 15874-5 -- Plastics Piping Systems for Hot and Cold Water - Polypropylene (PP) - Part 5: Fitness for Purpose of the System ISO 1167 -- Plastic Pipes for the Transport of Fluids - Determination of the Resistance to Internal Pressure ISO 12162 -- Thermoplastic Materials for Pipes and Fittings for Pressure Applications - Classification and Designation - Overall Service (Design) Coefficient 14.6 SEMATECH Document3 SEMASPEC 92010950B-STD -- Provisional Test Method for Visual Characterization of Surface Roughness for Plastic Surfaces of UPW Distribution System Components 5 Deutsches Institut fr Normung e.V., Available from Beuth Verlag GmbH, Burggrafenstrasse 4-10, D-10787 Berlin, Germany; http://www.din.de 11 SEMI F57-0120 SEMI 2000, 2020 Table 8 Related Standards for Plastic Piping Materials#1 Materials Tubing/Piping Fittings PP PREN 12202-1 DIN 16774 ISO/DIS 15874-1 ASTM D4101 PREN 12202-2 DIN 8077 DIN 8078 ISO/DIS 15874-2 PREN 12202-3 ISO/DIS 15874-3 PVDF ISO 10931-1 ASTM D3222 ISO 10931-2 ISO 10931-3 PVC PREN 1452-1 ASTM D1784 ASTM D3915 PREN 1452-2 PREN 1452-3 Valves DIN 3442-1 DIN 3442-2 DIN 3442-3 ISO 10931-4 Systems PREN 12202-5 ISO/DIS 15874-5 ISO/FDIS 10931-5 #1 See Related Documents, 14.2, 14.3, 14.4, 14.5, and 14.6. PREN 1452-4 PREN 1452-5 PFA ASTM D3307 ECTFE ASTM D3275 SEMI F52-1101 No standards SEMI F7-0299 SEMI F8-0998 SEMI F9-0998 SEMI F10-0698 SEMI F11-0998 SEMI F12-0998 SEMI F65-1101 SEMI F99-0705 SEMI F100-0705 No standards No standards No standards No standards SEMI F57-0120 SEMI 2000, 2020 12 APPENDIX 1 SUMMARY REPORT FORM NOTICE: The material in this Appendix is an official part of SEMI F57 and was approved by full letter ballot procedures on August 19, 2019. Material/Component Description: Material/Component Manufacturer: Material/Component Part Number: Material/Component Serial Number: ______________________ ______________________ ______________________ ______________________ Lab(s) Used Dates of Analysis Leaching Volume (mL) Leaching Surface Area (m2) ____________________________ ____________________________ ____________________________ ____________________________ Description of Test 6.7 Ionic Contamination Ammonium Bromide Chloride Fluoride Nitrate Nitrite Phosphate Sulfate 6.8 Metallic Contamination Aluminum Antimony Arsenic Barium Boron Cadmium Calcium Chromium Copper Iron Lead Lithium Magnesium Manganese Nickel Potassium Sodium Strontium Titanium Tin Specification Reporting limits Measured Value Conforms? Value#1 #2 100 g/m2 2 2 2 2 2 2 2 2 2 2- 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 22- 13 SEMI F57-0120 SEMI 2000, 2020  Description of Test Vanadium Zinc 6.9 Total Organic Carbon (TOC) Contamination 6.10 Surface Roughness Extruded (<250mm OD) Specification Value#1 2 2 2 Reporting limits Measured Value Conforms? #2 Injection Molded (<250mm OD) Machined (<250mm OD) #1 Fill in the appropriate specification from the corresponding section. #2 By my signature, I hereby certify that the above information is correct. Signature: ______________________________________ Print Name: ___________________________________ Title: ________________________________________ Company Name: _______________________________ Date: ________________________________________ Comments: ________________________ ___________________________________ ___________________________________ ___________________________________ ___________________________________ ___________________________________ ___________________________________ ___________________________________ SEMI F57-0120 SEMI 2000, 2020 14 RELATED INFORMATION 1 EXTRACTION MODELING AND CONTAMINATION PREDICTIONS NOTICE: This Related Information is not an official part of SEMI F57 and was derived from the work of the Liquid Chemicals Global Technical Committee. This Related Information was approved for publication by full letter ballot procedures on August 19, 2019. R1-1 Introduction R1-1.1 To establish surface-normalized extraction requirements for this Specification, room temperature and hot UPW distribution system models were developed. Utilizing these models and the UPW performance requirements established in SEMI F63 for contamination, trace metal, anion and TOC extraction levels were determined. To understand the exposure time dependence of the contamination extraction and to verify the ability of current state of the art UPW wetted materials (PVDF and PFA) to comply with these requirements, a multi-week extraction study was conducted in both room temperature and 85C UPW. R1-2 Extraction Models R1-2.1 Two distribution models were prepared for the study, an ambient or room temperature model and a hot ultrapure water (HUPW) model. The ambient UPW system was comprised of a main that was 200 mm diameter pipe that was 300 m long flowing at 2000 LPM and a lateral that was 75 mm diameter that was 50 m long flowing at 10.8 LPM (see Figure R1-1). Figure R1-1 Ambient UPW Distribution Loop Model R1-2.2 HUPW was comprised of a main that was 110 mm diameter that was 300 m long that flowed 500 LPM and a lateral that was 75 mm diameter that was 50 m long that flowed 10.8 LPM (see Figure R1-2). In both models, a key assumption is that the polish skid is completely effective in removing contamination (trace metals, anions, cations and TOC) to the limits of current analytical tools. Using this assumption, projecting contamination levels in the distribution system can be determined with the following equation: 15 SEMI F57-0120 SEMI 2000, 2020 Change in Concentration = Pipe Length (m) (Liters/Day) Diameter (m) Extraction rate (mg/m^2/Day) / Flow Rate Figure R1-2 HUPW Distribution Loop Model R1-2.3 Extraction Rates -- based on multiple week extraction testing for both ambient and HUPW testing (SEMI F40 using both ambient and 85C test conditions) extraction rates were measured for both PVDF pipe (32 mm d 7 cm l) and PFA tubing (25 ft. of in. tubing). The table below gives the average results for the different samples for PVDF and for PFA for both ambient and at 85C. A blank cell means all values were below the reporting limit. R1-3 HUPW System Model Results R1-3.1 85C Extraction Analysis Methodology Extraction data from Week 1, 2, and 5 were plotted as a function of extraction time. Extraction time set as the mid-point of the extraction period. Week 1 and 2 cumulative extraction (g/m2) were divided by 7 days to determine the extraction rate (g/m2/day). Week 5 cumulative extraction (g/m2) was divided by 21 days to determine the extraction rate (g/m2/day). The maximum allowable extraction rate was calculated using the supply model and the extraction model and the SEMI F63-1016 Specification. SEMI F57-0120 SEMI 2000, 2020 16 R1-3.2 Extraction Results Figure R1-3 Extraction Rates for HUPW for Aluminum, Calcium, Iron, and Magnesium 17 SEMI F57-0120 SEMI 2000, 2020 Figure R1-4 Extraction Rates for HUPW for Potassium, Sodium, Fluoride, and TOC SEMI F57-0120 SEMI 2000, 2020 18 Figure R1-5 Extraction Rates for HUPW for Chloride, Nitrite, Nitrate, and Sulfate R1-4 Ambient UPW System Model Results R1-4.1 Room Temperature Extraction Analysis Methodology Extraction rate data from week 1, 2, 5, and 8 (PVDF) and week 1, 2, and 4 (PFA) were plotted as a function of extraction time. Extraction time set as the mid-point of the extraction period. Week 1 and 2 (PVDF and PFA) cumulative extraction (mg/m2) were divided by 7 days to determine the extraction rate (mg/m2/day). Week 4 (PFA) cumulative extraction (mg/m2) was divided by 14 days to determine the extraction rate (mg/m2/day). Week 5 and 8 (PVDF) cumulative extraction (mg/m2) were divided by 21 days to determine the extraction rate (mg/m2/day). The maximum allowable extraction rate was calculated using the UPW supply model (slide 5), the extraction projection (slide 6) and the SEMI F63 Specification. 19 SEMI F57-0120 SEMI 2000, 2020 R1-4.2 Extraction Results Figure R1-6 Extraction Rates for Ambient UPW for Aluminum, Barium, Boron, and Calcium SEMI F57-0120 SEMI 2000, 2020 20 Figure R1-7 Extraction Rates for Ambient UPW for Chromium, Copper, Iron, and Lead 21 SEMI F57-0120 SEMI 2000, 2020 Figure R1-8 Extraction Rates for Ambient UPW for Lithium, Magnesium, Manganese, and Nickel SEMI F57-0120 SEMI 2000, 2020 22 Figure R1-9 Extraction Rates for Ambient UPW for Potassium, Sodium, and Zinc 23 SEMI F57-0120 SEMI 2000, 2020 Figure R1-10 Extraction Rates for Both Ambient and Hot UPW for TOC and Fluoride SEMI F57-0120 SEMI 2000, 2020 24 Table R1-1 Guide for PFA Tubing Extractables#1 Contaminant Target Values Reporting Limit g/m2 g/m2 Metals Aluminum 1 Arsenic#2 1 Antimony#2 1 Barium 2 Boron 20 Cadmium#2 1 Calcium 2 Chromium 1 0.02 0.080 0.008 0.008 0.080 0.008 0.08 0.008 Ions TOC Copper Iron Lead Lithium Magnesium Manganese Nickel Potassium Sodium Strontium Titanium#2 Tin#2 Vanadium#2 Zinc Ammonium#2 Bromide Chloride Fluoride Nitrate Nitrite Phosphate Sulfate Total Organic Carbon 1 1 1 1 1 1 1 2 1 0.5 1 1 1 1 10 <6000 <100 <10 <10 <30 <2000 0.02 0.02 0.008 0.02 0.02 0.008 0.02 0.02 0.02 0.008 0.02 0.02 0.008 0.02 0.79 0.79 0.3 0.2 0.79 0.3 0.79 0.79 300 #1 This data is based on the testing for establishing revised values for SEMI F57 Tables 2, 3, and 4. #2 Indicates newly added elements to SEMI F57 in this revision. 25 SEMI F57-0120 SEMI 2000, 2020 RELATED INFORMATION 2 SURFACE EXTRACTABLE CONTAMINATION AT 85C NOTICE: This Related Information is not an official part of SEMIF57 and was derived from the work of the Liquid Chemicals Global Technical Committee. This Related Information was approved for publication by full letter ballot procedures on August 19, 2019. R2-1 Introduction R2-1.1 Tables 3, 4, and 5 located within the main body of SEMI F57, were originally compiled from various databases spanning years of extraction studies. Today the values contained within these tables remain unchallenged and provide the microelectronics industry with a means of determining polymer material and component product cleanliness. R2-2 Background R2-2.1 Industry experts along with various suppliers developed the tools for determining and monitoring the clean production requirements necessary to provide the industry with useable polymer materials and components. Using best available manufacturing practices and analytical techniques these rudimentary tests paved the way to verify such efficacy. R2-2.2 For the most part, the conditions of these early extraction studies mimicked the efforts of the pioneers of testing, such as the Ultra Clean Society of Japan and members of a SEMATECH taskforce who authored SEMASPEC #92010934B, Provisional Test Method for Sample Preparation for Chemical Testing of UPW Distribution System Components. High temperature UPW testing was commonplace at that time. In fact, within the SEMASPEC document one can find the following quote: "Heated Water. Ultrapure water with a temperature of 80 5C is specified. Hot UPW is more aggressive on system components than ambient temperature water. Contaminants distributed within the components are extracted from depths further from the surface. The time required leaching an equivalent concentration of a hydrophilic contaminant with hot UPW is less than the time required using ambient temperature UPW. Consequently, accelerated tests can be performed whenever sample preparations use HUPW." R2-2.3 Since then, other polymer materials and components with a lower temperature tolerance have been installed in lesser demanding UPW supply and return lines. Naturally, end-users and suppliers alike would welcome the confirmation that such products are SEMI F57 compliant. R2-3 The SEMI F57 Goal R2-3.1 It is not the intent to SEMI F57 to exclude any material that might meet the requirements of the end-user. At the same time, though, it is the goal of this Document to be the watchdog over materials that should be selected for use in the ever-advancing state-of-the-art factories with their increasing sensitivity to atomic level contamination. R2-4 The Dilemma R2-4.1 To evaluate materials whose polymer structure cannot withstand extraction testing at 85C, a lower temperature protocol is necessary. The obvious problem is that a lower temperature protocol, even if supported by significant testing data, may still create an avenue for lesser products being considered SEMI F57 compliant. The need to specify 85C at 7 days is not being questioned as the de facto conditions for conducting the testing. What is being asked is whether an alternative temperature and time could be defined to allow testing of materials that cannot be tested at 85C, for example, an alternative extraction protocol. R2-5 The Task for the SEMI F57 Task Force R2-5.1 Prior to the time of release of this Document, the SEMI F57 Rewrite Task Force was given the following four issues to consider regarding the extraction testing of materials at lower temperatures. 1. State your position on creating an alternative testing protocol that would allow testing at lower temperatures. 2. State your reasons and possibly data that support your independent position. SEMI F57-0120 SEMI 2000, 2020 26 3. If your position is not to include an alternative extraction protocol, then what wording (if any) do you advise we include in SEMI F57 to answer questions regarding testing at lower temperatures. 4. If your position is to include an alternative extraction protocol, your comments regarding how this can be done while ensuring data generated at lower temperatures/higher times is at least equivalent, or possibly slightly more sensitive than the current protocol at 85C. R2-6 The Outcome and Summary R2-6.1 The Task Force majority arrived at the following general consensus: An alternative protocol could benefit the industry if one could be developed. To be included in SEMI F57, a testing protocol must be supported by data that clearly shows the results to be equivalent (minimum) to the current 7 day test at 85C. To date, the industry has not produced the necessary data to support an alternative protocol and thus, cannot be included in this revision of SEMI F57. Therefore, the current 7 day test at 85C will be kept as the SEMI F57 standard. The goal of the SEMI F57 Task Force is to provide adequate guidelines within the Document, allowing companies to collect data that could be useful for reviewing an alternative protocol in future revisions. That is to say, if endusers require lower temperature testing then it behooves those interested in such to begin collecting a database extracted in conjunction with a control piece tested at 85C. Future industry efforts to investigate alternative testing protocols should conduct such testing under the following recommended guidelines: 1. Materials or component testing must be conducted using at least one control sample that is believed to be SEMI F57 compliant. 2. Control sample needs to be similar in geometry to the material/component to be tested. Surface area and leach volume need to be equivalent. 3. Control sample is tested to standard 7 days at 85C for base line measurements. 4. Control sample is then tested using the alternative (proposed) testing conditions. The alternative test condition is validated only when the contamination levels are either equivalent too or higher than what was collected for the 7 days at 85C. 5. Once the alternative testing conditions are validated, the new material or component can then be tested using these new alternative testing conditions. 6. It is recommended that the following be included in the final test report: Photo of part and control sample; Base line Data from testing agency including all testing conditions; All data collected from testing agency when establishing the testing protocol. Final test protocol to be defined in the report; Final report from testing agency showing results from testing materials or components using the established testing protocol. 27 SEMI F57-0120 SEMI 2000, 2020 NOTICE: SEMI makes no warranties or representations as to the suitability of the Standards and Safety Guidelines set forth herein for any particular application. The determination of the suitability of the Standard or Safety Guideline product data sheets, and other relevant literature, respecting any materials or equipment mentioned herein. Standards and Safety Guidelines are subject to change without notice. By publication of this Standard or Safety Guideline, SEMI takes no position respecting the validity of any patent rights or copyrights asserted in connection with any items mentioned in this Standard or Safety Guideline. Users of this Standard or Safety Guideline are expressly advised that determination of any such patent rights or copyrights and the risk of infringement of such rights are entirely their own responsibility. SEMI F57-0120 SEMI 2000, 2020 28 Copyright by SEMI, 673 S. Milpitas Blvd., Milpitas, CA 95035. Reproduction of the contents in whole or in part is forbidden without express written consent of SEMI.